Chuck for holding a workpiece
AssigneeASM Assembly Automation Ltd.
InventorsYiu Ming Cheung, Ka Wing Wong
Life of this patent
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Abstract
The invention provides a chuck for holding a workpiece, such as a chip-array semiconductor Chip Scale Packages (CSP) substrate, having a plurality of components such as CSPs to be singulated, and chaff areas of the components. The chuck comprises means to hold the chaff areas when the components are being singulated, that may include a first pressure means to hold the components and a second pressure means to hold the chaff areas.
Claims11
An apparatus to singulate a plurality of components of a workpiece, the workpiece having chaff areas, the apparatus comprising:
- a chuck to hold the workpiece, the chuck including a first pressure arrangement to restrain the chaff areas directly on the chuck to prevent the chaff areas from moving while the components are being singulated, the chuck further including a second pressure arrangement to hold the components of the workpiece while the components are being singulated;
- and
- a cleansing arrangement operable to remove the chaff areas from the chuck when the first pressure arrangement is deactivated and the second pressure arrangement is activated.
A chuck for holding a workpiece, the workpiece including a plurality of components to be singulated and chaff areas, the chuck comprising:
- a workpiece receiving arrangement configured to receive the workpiece;
- chaff holding means operative to hold the chaff areas of the workpiece directly on the chuck to restrain the chaff areas from moving while the components are being singulated, and
- respective first pressure means to hold the components and the chaff holding means comprise second pressure means to hold the chaff areas.
A chuck to hold a workpiece having a plurality of components to be singulated and chaff areas, the chuck comprising:
- a chaff restraining arrangement to restrain the chaff areas directly on the chuck to prevent the chaff areas from moving while the components are being singulated, the chaff restraining arrangement includes a first pressure arrangement to restrain the chaff areas, the chuck further comprising a second pressure arrangement to hold the components while the components are being singulated.
Dependencies are inferred from the claim text.