Semiconductor processing process control system and its control method

A semiconductor processing process control system comprising:

• a process controller main body having a function of controlling part of controls of processes for semiconductor processing, which is independent from semiconductor processing devices and processing targets;
• a plurality of control variable computing sections provided for respective the semiconductor processing devices and the processing targets to obtain control variables of semiconductor processing devices which meet the semiconductor processing devices and the processing targets;
• and
• a control variable computation method section detachably inserted into the process controller main body to manage the control variable computing sections according to a computing method over a plurality of predetermined processes, the control variable computing sections detachably inserted into the control variable computation method section, the process controller main body controlling processes of semiconductor processing on a basis of control variables obtained by the control variable computation method section inserted into the process controller main body and the control variable computing section inserted into the control variable computation method section.

A method for controlling a semiconductor processing process control system which includes a process controller main body having a function of controlling part of controls of processes for semiconductor processing, which is independent from semiconductor processing devices and processing targets, comprising the steps of:

• selecting one of a plurality of control variable computing sections which are provided for respective the semiconductor processing devices and the processing targets and can be detachably inserted into the process controller main body, and inserting the control variable computing section, which is selected, into the process controller main body;
• operating the control variable computing section inserted into the process controller main body to obtain a control variable of a semiconductor processing device, which is agreeable with the semiconductor processing devices and the processing targets;
• and
• operating the process controller main body to control a process for semiconductor processing on the basis of the control variable obtained.

A method for controlling a semiconductor processing process control system which includes a process controller main body having a function of controlling part of controls of processes for semiconductor processing, which is independent from semiconductor processing devices and processing targets, comprising the steps of:

• selecting at least one of a plurality of control variable computing sections, which are provided for respective the semiconductor processing devices and the processing targets;
• selecting one of a plurality control variable computation method sections which manage the control variable computing sections over a plurality of processes, the control variable computation method sections being configured to be detachably inserted into the process controller main body when necessary, and the control variable computing sections being configured to be detachably inserted into the control variable computation method sections;
• inserting the control variable computing sections selected into the control variable computation method section selected, and inserting the control variable computation method section into the process controller main body;
• operating the control variable computation method section inserted into the process controller main body and a control variable computing section inserted into the control variable computation method section to obtain a control variable of a semiconductor processing device which is agreeable with the semiconductor processing devices and the processing targets;
• and
• operating the process controller main body to control processes for semiconductor processing on the basis of the control variable obtained.