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US 6,744,268 B2Granted
High resolution analytical probe station
AssigneeThe Micromanipulator Company, Inc.
InventorKenneth F. Hollman
Life of this patent
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Abstract
A specimen probing apparatus in provided including a vacuum chamber within which a carrier for the specimen to be probed and a probe assembly are positioned. The housing for the chamber is preferably constructed to allow a variety of options for electrically isolating the test environment in the chamber. Also, unique drive or shift assemblies for the carrier and probe assembly are disclosed for allowing precision movements thereof in the vacuum chamber.
Claims15
A probe station for high resolution, low current probing of a device under test (DUT), the probe station comprising:
- a vacuum housing having an interior space in which a DUT is disposed with the interior space under vacuum conditions during testing operation;
- a high resolution microscope extending into the interior space for taking images of the DUT;
- a housing wall assembly generally extending about the interior space;
- and
- at least two portions of the wall assembly that are of electrically conductive material and are insulated from each other to allow flexibility in providing different electrical guarding or shielding arrangements for the interior space.
2 more elements
Dependencies are inferred from the claim text.