Purifier of noxious gas and method for manufacturing the same
OwnerKenzo Shimakawainventor
Life of this patent
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Abstract
A purifier of a noxious gas is provided with structure for supplying a gas containing a noxious gas component, a buffer using a liquid which dissolves the noxious gas component in the supplied gas temporarily and later releases the dissolved noxious gas component, and structure for purifying the noxious gas component in the gas supplied from the buffer means. The liquid in the buffer dissolves the noxious gas component when the concentration of the noxious gas component in the supplied gas is high and releases the noxious gas component dissolved thus far when the concentration is low. When the noxious gas is ethylene oxide, water is used as the liquid.
Claims20
A purifier of a noxious gas comprising means for supplying a gas containing a noxious gas component, buffer means using a liquid that dissolves the noxious gas component in the supplied gas temporarily and later releases the dissolved noxious gas component, and means for purifying the noxious gas component in the gas supplied from the buffer means,
- wherein the liquid in the buffer means dissolves the noxious gas component when a concentration of the noxious gas component in the supplied gas is high and releases the noxious gas component previously dissolved when the concentration is low.
Dependencies are inferred from the claim text.