Composite metallic ultrafine particles and process for producing the same
AssigneeEbara Corporation
InventorsAkira Fukunaga, Hiroshi Nagasawa, Kaori Kagoshima, Makiko Emoto
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Abstract
The present invention relates to composite metallic ultrafine particles which have excellent dispersion stability and can be produced on an industrial scale, and a process for producing the same, and a method and an apparatus for forming an interconnection with use of the same. A surface of a core metal produced from a metallic salt, a metallic oxide, or a metallic hydroxide and having a particle diameter of 1 to 100 nm is covered with an organic compound including a functional group having chemisorption capability onto the surface of the core metal.
Claims4
A process for producing composite metallic ultrafine particles with a core metal covered by a protective layer, consisting of:
- providing a metal source having a metallic component selected from the group consisting of a metallic salt, a metallic oxide, and a metallic hydroxide,
- providing an organic compound having a functional alcoholic hydroxyl group,
- mixing the metal source and the organic compound to form a mixture of the metal source and the organic compound, and
- heating the mixture of the metal source and the organic compound to a temperature at which the metallic components gather together to form the core metal, and the alcoholic hydroxyl group of the organic compound becomes bonded to a surface of the core metal, thereby forming the core metal and the protective layer of the organic compound.
Dependencies are inferred from the claim text.