Grounded centering ring for inhibiting polymer build-up on the diaphragm of a manometer
AssigneeLam Research Corporation
InventorsJoe A. Lombardi, Roger Schutz
Life of this patent
Estimating the term…
Abstract
A grid protects a manometer diaphragm from plasma. A plasma chamber is used to generate a plasma. A manometer is used to measure the pressure in the plasma chamber. A grounded electrically conductive grid is used to screen out ions in the plasma before they reach a diaphragm in the manometer. The grid may be formed in a centering ring. A pipe may be used to connect the manometer to the plasma chamber. The centering ring may be placed in the joint in the pipe, with the centering ring and grid being grounded to the pipe.
Claims15
An apparatus for protecting a manometer including a diaphragm, which is used to measure pressure in a plasma processing device, comprising:
- a passageway, which provides a fluid connection between the plasma processing device and the diaphragm, wherein the passageway has a cross-section which crosses a direction of fluid flow;
- and
- an electrically conductive grid across the cross-section of the passageway.
An apparatus for measuring pressure in a plasma processing device, comprising:
- a passageway, which provides a fluid connection with the plasma processing device and a diaphragm, wherein the passageway has a cross-section which crosses a direction of fluid flow;
- a manometer comprising a diaphragm in fluid connection with the passageway;
- and
- an electrically conductive grid across the cross-section of the passageway.
Dependencies are inferred from the claim text.