In-line oscillating device
AssigneeNanya Technology Corporation
InventorChih-Kun Chen
Life of this patent
Estimating the term…
Abstract
An in-line oscillating device is essentially composed of an oscillating tank, an oscillating pipe, and an oscillating generator. The oscillating pipe is set in the oscillating tank and connects with a slurry pipe. The oscillating generator for generating ultrasonic waves is mounted on the oscillating tank. Furthermore, the oscillating tank is filled with a medium to transmit the ultrasonic waves generated by the oscillating generator to the oscillating pipe. The in-line oscillating device is suitable to be mounted on any location of the slurry pipe where oscillation is needed.
Claims16
An in-line oscillating device connected with a slurry pipe by which a liquid with particles is transmitted, comprising:
- an oscillating tank;
- an oscillating pipe located in the oscillating tank and connected with the slurry pipe so that the liquid with particles passes through the oscillating pipe;
- and
- an oscillating generator mounted on the oscillating tank, wherein the oscillating generator is adapted to oscillate the particles passing through the oscillating pipe.
A slurry pipe system suitable for supplying slurry to a chemical mechanical polishing (CMP) machine, comprising:
- a slurry pipe suitable for transmitting the slurry to the CMP machine;
- and
- an in-line oscillating device comprising an oscillating tank, an oscillating second pipe, and an oscillating generator, the oscillating pipe located in the oscillating tank and connected with the slurry pipe and the oscillating generator mounted on the oscillating tank.
Dependencies are inferred from the claim text.