Multi-layer burner module, adapter, and assembly therefor

A burner module for delivering a flow of chemical reactants to a combustion site of a chemical vapor deposition process, said burner module comprising:

• a) a plurality of substantially planar layers arranged in a generally parallel and fixed relationship and defining an inlet, an outlet and a passage fluidly connecting said inlet and said outlet, at least one of said layers being a first distribution layer having a plurality of apertures therethrough and fluidly communicating with said passage;
• b) wherein said plurality of apertures collectively define a first non-uniform pattern arranged and configured to improve the uniformity of a flow out through said outlet and further including:
• a second inlet;
• a second outlet;
• a second passage fluidly connecting said second inlet and said second outlet;
• and
• a plurality of second apertures formed in said at least one of said layers and fluidly communicating with said second passage;
• wherein said plurality of second apertures collectively define a second non-uniform pattern arranged and configured to improve the uniformity of a flow out through said second outlet;
• and
• wherein said first non-uniform pattern is different from said second non-uniform pattern.

A burner module for delivering a flow of chemical reactants to a combustion site of a chemical vapor deposition process, said burner module comprising:

• a plurality of substantially planar layers arranged in a generally parallel and fixed relationship and defining an inlet, an outlet and a passage fluidly connecting said inlet and said outlet, at least one of said layers being a distribution layer having a plurality of apertures therethrough and fluidly communicating with said passage;
• wherein said plurality of apertures collectively define a non-uniform pattern arranged and configured to improve the uniformity of a flow out through said outlet, the module further comprising:
• a) a substantially planar lower plenum layer having first and second slots formed therein;
• b) a substantially planar upper plenum layer having first and second slots formed therein;
• c) a burner face layer overlying said upper plenum layer, said burner face layer including at least first and second burner apertures fluidly communicating with said first and second slots of said upper plenum layer, respectively;
• d) wherein said distribution layer is interposed between said upper and lower plenum layers and includes:
• a plurality of first apertures formed therein and fluidly communicating with said first slots of said upper and lower plenum layers, wherein said plurality of first apertures collectively define a first non-uniform pattern;
• and
• a plurality of second apertures formed therein and fluidly communicating with said second slots of said upper and lower plenum layers, wherein said plurality of second apertures collectively define a second non-uniform pattern;
• and
• e) wherein said first and second non-uniform patterns are arranged and configured to improve the uniformity of a flow through said lower plenum layer, said distribution layer and said upper plenum layer and out through said first and second burner apertures and further including a second distribution layer underlying said lower plenum layer, said second distribution layer including:
• a plurality of third apertures formed therein and fluidly communicating with said first slot of said lower plenum layer, wherein said plurality of third apertures collectively define a third non-uniform pattern;
• and
• a plurality of fourth apertures formed therein and fluidly communicating with said second slot of said lower plenum layer, wherein said plurality of fourth apertures collectively define a fourth non-uniform pattern.

A burner mounting adapter for use with a manifold having a mount surface and first and second fluid supply openings in the mount surface and distributed at different locations along a length of the manifold, said burner mounting adapter comprising:

• a) an adapter body;
• b) a first inlet aperture, a first outlet aperture and a first connecting passage fluidly connecting said first inlet and outlet apertures defined in said adapter body;
• and
• c) a second inlet aperture, a second outlet aperture and a second connecting passage fluidly connecting said second inlet and outlet apertures defined in said adapter body;
• d) wherein said first and second inlet apertures are arranged and configured to align with the first and second fluid supply openings, respectively, when said burner mounting adapter is mounted on the mount surface of the manifold;
• and
• e) wherein said first and second passages extend transversely of the manifold length when said burner mounting adapter is mounted on the mount surface of the manifold.

A burner module for use with a manifold having a mount surface and first and second fluid supply openings in the mount surface and distributed at different locations along a length of the manifold, said burner module comprising:

• a) a burner mounting adapter including:
• 1) an adapter body;
• 2) a first inlet aperture, a first outlet aperture and a first connecting passage fluidly connecting said first inlet and outlet apertures defined in said adapter body;
• and
• 3) a second inlet aperture, a second outlet aperture and a second connecting passage fluidly connecting said second inlet and outlet apertures defined in said adapter body;
• 4) wherein said first and second inlet apertures are arranged and configured to align with the first and second fluid supply openings, respectively, when said burner mounting adapter is mounted on the mount surface of the manifold;
• and
• 5) wherein said first and second passages extend transversely of the manifold length when said burner mounting adapter is mounted on the mount surface of the manifold;
• and
• b) a burner face layer overlying said adapter body, said burner face layer including at least first and second burner apertures fluidly communicating with said first and second outlet apertures of said adapter body, respectively.

A burner assembly for delivering a flow of chemical reactants to a combustion site of a chemical vapor deposition process, said burner assembly comprising:

• a) a manifold including:
• 1) a mount surface;
• and
• 2) first and second fluid supply openings in said mount surface and distributed at different locations along a length of said manifold;
• b) a burner module comprising:
• 1) a burner mounting adapter including:
• i) an adapter body:
• ii) a first inlet aperture, a first outlet aperture and a first connecting passage fluidly connecting said first inlet and outlet apertures defined in said adapter body;
• and
• iii) a second inlet aperture, a second outlet aperture and a second connecting passage fluidly connecting said second inlet and outlet apertures defined in said adapter body;
• iv) wherein said first and second inlet apertures are arranged and configured to align with the first and second fluid supply openings, respectively, when said burner mounting adapter is mounted on the mount surface of the manifold;
• and
• v) wherein said first and second passages extend transversely of the manifold length when said burner mounting adapter is mounted on the mount surface of the manifold;
• and
• 2) a burner face layer overlying said adapter body, said burner face layer including at least first and second burner apertures fluidly communicating with said first and second outlet apertures of said adapter body, respectively.