Method and apparatus for dispensing fluids
AssigneeIntegrated Designs, L.P.
InventorsRaymond T. Savard, John C. Vines
Life of this patent
Estimating the term…
Abstract
A method and system for dispensing a precise amount of a chemical used in the fabrication of semiconductors utilizes rolling membrane pump and calculates an amount by which to change a dispense based at least in part on a predicted membrane flex. Membrane flex is predicted, at least in part, by the shape of the membrane, a volume of liquid to be dispensed and a pressure during dispense.
Claims24
An apparatus for dispensing chemicals used in semiconductor fabrication processes, comprising:
- a reservoir for storing a supply of a chemical used in fabrication of semiconductors;
- a dispense point from which the chemical is dispensed;
- a pump in fluid communication with the reservoir for pumping a desired volume of the chemical out of the dispense point, the pump including,
- a piston reciprocating within a pumping chamber and displacing a known volume based on a distance that it is displaced, the movement of the piston causing displacement of chemical from a pumping chamber to the dispense point;
- a diaphragm partially supported by the piston and extending between the piston and sides of the pumping chamber, the diaphragm having associated with it deformation during at least a portion of a pumping cycle, the deformation resulting in displacement from the pumping chamber of a lesser volume of chemical than the volume displaced by the piston;
- and
- a controller mechanism for moving the piston to dispense the chemical through the dispense point, the controller mechanism accounting for predicted deformation of the diaphragm during dispensing in order to pump the desired volume of the chemical.
A method for dispensing a precise amount of a viscous liquid utilizing a pump with a piston partially supporting a diaphragm extending between the piston and sides of a pumping chamber, said method comprising:
- determining an adjustment to a distance to move the piston to account for increased volume in the pumping chamber caused by deformation of the diaphragm during dispensing, the amount of the adjustment based at least in part on a predicted deformation of the diaphragm during dispensing;
- opening an output valve of said pumping system for permitting the viscous liquid to be dispensed;
- and
- moving the piston the adjusted distance in order to displace from the pumping chamber the desired volume of viscous liquid to a dispense point, whereupon the viscous liquid is dispensed.
A method for dispensing a precise amount of a viscous liquid utilizing a pump with a piston partially supporting a diaphragm extending between the piston and sides of a pumping chamber, said method comprising:
- determining an adjustment to a distance to move the piston to account for increased volume in the pumping chamber caused by deformation of the diaphragm during dispensing, the amount of the adjustment based at least in part on a desired volume of the viscous liquid to be dispensed during movement of the piston;
- opening an output valve of said pumping system for permitting the viscous liquid to be dispensed;
- moving the piston the adjusted distance in order to displace from the pumping chamber the desired volume of viscous liquid to a dispense point, thereby dispensing the viscous liquid;
- and monitoring pressure of the viscous liquid in the pumping chamber.
Dependencies are inferred from the claim text.