Vibration control apparatus, vibration control method, exposure apparatus, and device manufacturing method
AssigneeCanon Kabushiki Kaisha
InventorHiroshi Ito
Life of this patent
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Abstract
The object of this invention is to constitute a high-accuracy position control system even for a low-rigidity object to be controlled. To achieve this object, a vibration control apparatus includes a measurement device which measures the elastic vibration of an object to be controlled, a driving device which applies a force to the object, and a compensation device which determines a force to be generated by the driving device. The measurement device measures at least a position component out of the position, speed, and acceleration components of the elastic vibration. The compensation device controls the elastic vibration of the object on the basis of position information measured by the measurement device.
Claims16
A vibration control apparatus comprising:
- a measurement device which measures an elastic vibration of an object to be controlled;
- a driving device which applies a force to the object;
- and
- a compensation device which determines a force to be generated by said driving device,
- wherein said measurement device measures at least a position component out of the position component, a speed component, and an acceleration component of the elastic vibration, and said compensation device controls the elastic vibration of the object on the basis of position information measured by said measurement device.
A vibration control apparatus comprising:
- a first measurement device which measures an elastic vibration of an object to be controlled;
- a first driving device which applies a force to the object;
- a first compensation device which determines a force to be generated by said driving device;
- a second measurement device which measures a position of the object from a reference position;
- a second driving device which externally applies a force to the object;
- and
- a second compensation device which determines a force to be generated by said second driving device,
- wherein said first measurement device measures at least a speed component out of a position component, the speed component, and an acceleration component of the elastic vibration, said first compensation device controls the elastic vibration of the object on the basis of speed information measured by said first measurement device, and said second compensation device controls a rigid-body vibration of the object on the basis of position information measured by said second measurement device.
A vibration control method using a vibration control apparatus having a measurement device which measures an elastic vibration of an object to be controlled, a driving device which applies a force to the object, and a compensation device which determines a force to be generated by the driving device, wherein
- the measurement device measures at least a position component out of the position component, a speed component, and an acceleration component of the elastic vibration, and the compensation device controls the elastic vibration of the object on the basis of position information measured by the measurement device.
A vibration control method using a vibration control apparatus having a first measurement device which measures an elastic vibration of an object to be controlled, a first driving device which applies a force to the object, a first compensation device which determines a force to be generated by the driving device, a second measurement device which measures a position of the object from a reference position, a second driving device which externally applies a force to the object, and a second compensation device which determines a force to be generated by the second driving device, wherein
- the first measurement device measures at least a speed component out of a position component, the speed component, and an acceleration component of the elastic vibration, the first compensation device controls the elastic vibration of the object on the basis of speed information measured by the first measurement device, and the second compensation device controls a rigid-body vibration of the object on the basis of position information measured by the second measurement device.
Dependencies are inferred from the claim text.