Short coherence fiber probe interferometric measuring device
AssigneeRobert Bosch GmbH
InventorPawel Drabarek
Life of this patent
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Abstract
An interferometric measuring device for measuring surface characteristics, shapes, distances, and distance variations, e.g., vibrations, in particular in narrow, hollow spaces, of measuring objects, having a probe part and an optical fiber. Surface dimensions are able to be measured, even in very fine bore holes, in that, in a measuring head, at the free end of the probe part approaching the measuring object, the optical fiber projects out and is itself designed as a measuring fiber for illuminating a point of measurement and for picking up measuring light coming from this measuring point.
Claims8
An interferometric measuring device for measuring surface characteristics, shapes, distance variations, and vibrations, comprising:
- a probe part;
- an optical fiber;
- a measuring head, wherein:
- in the measuring head, at a free end of the probe part approaching a measuring object, the optical fiber projects out and corresponds to a measuring fiber for illuminating a point of measurement and for picking up a measuring light coming from the point of measurement;
- a fiber section arranged in the probe part, the fiber section being preconnected to the measuring fiber, wherein:
- an interface between the fiber section and the measuring fiber is utilized as a beam-splitter surface for forming a reflected reference wave and a transmitted measuring wave.
Dependencies are inferred from the claim text.