Single motor, multi-axis stage
AssigneeAdvantest Corporation
InventorShambhu N. Roy
Life of this patent
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AssigneeAdvantest Corporation
InventorShambhu N. Roy
Estimating the term…
A movable stage system includes a motor which rotates a rotational element, a transmission system engaged with the motor and selectively engaged with a platform, a first lock which engages the transmission system such that the transmission system moves the platform according to a rotation of the rotational element, a second lock which engages the transmission system such that the transmission system moves the platform moves according to the rotation of the rotational element. When the first lock engages and the second lock does not engage the transmission system, the transmission system moves the platform in a first direction according to the rotation of the rotational element. When the first lock does not engage and the second lock engages with the transmission system, the transmission system moves the platform in a second direction other than the first direction according to the rotation of the rotational element.
An actuator system for moving a platform, comprising:
An actuator system for moving a platform, comprising:
A movable stage system, comprising:
An actuator system for moving a platform, comprising:
Dependencies are inferred from the claim text.