Determination of a process flow based upon fault detection analysis

A method, comprising:

• performing a process step upon a workpiece;
• acquiring metrology data relating to said workpiece;
• acquiring tool state data relating to said process performed upon said workpiece;
• performing fault detection analysis based upon said metrology data and said tool state data, performing said fault detection analysis comprises:
• determining a severity level of a detected fault;
• determining whether said detected fault is within a predetermined range of tolerance;
• determining whether said fault can be corrected;
• and;
• performing an automatic workpiece routing process based upon said fault detection analysis, said automatic workpiece routing process comprising using a controller to perform at least one of a rework process routing, a non-standard process routing, a fault verification process routing, a normal process routing, and a termination process routing, based upon said fault detection analysis.