Method and apparatus for scheduling based on state estimation uncertainties
AssigneeAdvances Micro Devices, Inc.
InventorAlexander J. Pasadyn
Life of this patent
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Abstract
A method for scheduling activities in a manufacturing system includes defining a plurality of observed states associated with the manufacturing system. State estimates are generated for the observed states. Uncertainty values for the state estimates are generated. A plurality of candidate schedules for performing activities in the manufacturing system is identified. Changes to the uncertainty values are predicted based on the candidate schedules. One of the candidate schedules is selected based on the predicted changes to the uncertainty values.
Claims36
A method for scheduling activities in a manufacturing system, comprising:
- defining a plurality of observed states associated with the manufacturing system;
- generating state estimates for the observed slates;
- generating uncertainty values for the state estimates;
- identifying a plurality of candidate schedules for performing activities in the manufacturing system;
- predicting changes to the uncertainty values based on the candidate schedules;
- and
- selecting one of the candidate schedules based on the predicted changes to the uncertainty values.
A method for scheduling activities in a manufacturing system, comprising:
- defining a plurality of observed states associated with the manufacturing system;
- generating state estimates for the observed states;
- generating uncertainty values for the state estimates;
- identifying a plurality of candidate process activities in the manufacturing system;
- predicting changes to the uncertainty values based on processing each of the candidate process activities first;
- and
- selecting one of the candidate process activities for processing first based on the predicted uncertainty values.
A method for scheduling activities in a manufacturing system, comprising:
- defining a plurality of observed states associated with the manufacturing system;
- generating state estimates for the observed states;
- generating uncertainty values for the state estimates;
- identifying a plurality of candidate process tools capable of performing a selected process activity;
- predicting changes to the uncertainty values based on performing the selected process activity on each of the candidate process tools;
- and
- selecting one of the candidate process tools for performing the selected process activity based on the predicted uncertainty values.
A system for scheduling activities in a manufacturing system, comprising:
- a process controller configured to define a plurality of observed states associated with the manufacturing system, generate state estimates for the observed states, and generate uncertainty values for the state estimates;
- and
- a scheduling controller configured to identity a plurality of candidate schedules for performing activities in the manufacturing system, predict changes to the uncertainty values based on the candidate schedules, and select one of the candidate schedules based on the predicted changes to the uncertainty values.
A system for scheduling activities in a manufacturing system, comprising:
- a process controller configured to define a plurality of observed states associated with the manufacturing system, generate state estimates for the observed slates, and generate uncertainty values for the state estimates;
- and
- a scheduling controller configured to identify a plurality of candidate process activities in the manufacturing system, predict changes to the uncertainty values based on processing each of the candidate process activities first, and select one of the candidate process activities for processing first based on the predicted uncertainty values.
A system for scheduling activities in a manufacturing system, comprising:
- a process controller configured to define a plurality of observed states associated with the manufacturing system, generate state estimates for the observed states, and generate uncertainty values for the state estimates;
- and
- a scheduling controller configured to identify a plurality of candidate process tools capable of performing a selected process activity, predict changes to the uncertainty values based on performing the selected process activity on each of the candidate process tools, and select one of the candidate process tools for performing the selected process activity based on the predicted uncertainty values.
A system for scheduling activities in a manufacturing system, comprising:
- means for defining a plurality of observed states associated with the manufacturing system;
- means for generating state estimates for the observed states;
- means for generating uncertainty values for the state estimates;
- means for identifying a plurality of candidate schedules for performing activities in the manufacturing system:
- means for predicting changes to the uncertainty values based on the candidate schedules;
- and
- means for selecting one of the candidate schedules based on the predicted changes to the uncertainty values.
Dependencies are inferred from the claim text.