Burner manifold apparatus for use in a chemical vapor deposition process

A burner manifold assembly for delivering reactants to the combustion site of a chemical vapor deposition process, comprising:

• a burner manifold apparatus having fluid inlets, fluid outlets, and a plurality of fluid passages extending between the fluid inlets and the fluid outlets, the fluid passages converging toward each other from the fluid inlets to the fluid outlets;
• and
• a burner mounted to the burner manifold apparatus, the burner having a linear array of at least one of slots and orifices, the linear array being in fluid communication with the fluid passages at the fluid outlets.

A burner manifold apparatus for delivering reactants to a combustion site of a chemical vapor deposition process, comprising:

• fluid inlets, fluid outlets, and a plurality of fluid passages extending between the fluid inlets and the fluid outlets, the fluid passages converging toward each other from the fluid inlets to the fluid outlets, wherein the fluid passages have a smaller cross section at the fluid outlets than at the fluid inlets, and
• a plurality of manifold elements positioned in a stacked arrangement such that fluid passages extend through the manifold elements and terminate at the fluid outlets, the manifold elements fluidly communicating with each other via the fluid passages, each of the manifold elements having a greater number of fluid passages than a manifold element stacked therebelow such that the topmost manifold element has a greatest number of fluid passages therethrough and such that the fluid passages converge at the fluid outlets.