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US 6,736,590 B1Granted
Lifting device for substrates
AssigneeSteag Hama Tech AG
InventorsPeter Abendschön, Stefan Herrmann
Life of this patent
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Abstract
The aim of the invention is to make it as easy as possible to change a spindle in a lifting device (2) for substrates, which device comprises a support (10). To this end the support is configured such that it can be made to engage the substrate holder (25) by rotation or by pivoting.
Claims10
A lifting device for substrates, comprising:
- a substrate holder;
- a movable support that is adapted to be brought into or out of an operating position in which it is engaged with said substrate holder via a rotation of said support, said support being adapted to effect at least one of raising and lowering said substrate holder in said operating position of said support;
- means for moving said substrate holder into and out of contact with said support to effect said rotation of said support;
- and
- means for lifting or lowering said support.
2 more elements
Dependencies are inferred from the claim text.