Recipe management system

A semiconductor fabrication method, comprising the steps of:

• receiving a first job file for a processing tool through a network, said first job file including an approved master job file for said processing tool;
• receiving a second job file through said network, said second job file received from a host processor associated with said processing tool;
• and
• comparing said first and second job files to determined whether said first and second job files differ.

A fabrication system, comprising:

• a network;
• at least one exposure tool for projecting a circuit pattern on a surface of a wafer;
• a master job file processor for providing a plurality of approved master job files associated with said exposure tool;
• at least one host processor associated with each of said at least one exposure tool;
• and
• a comparsion processor, said comparison processor configured to:
• receive a first job file for said at least one exposure tool through said network from said master job file processor using File Transfer Protocol (FTP);
• receive a second job file through said network from said host processor using FTP;
• and
• compare said first and second job files, wherein said comparison processor determines whether said first and second job files differ.