MEMS mirror and method of fabrication

A moveable micromirror for selectively directing optical beams, the micromirror comprising:

• a substrate formed of a first single crystal of silicon;
• a post extending from within a moat in a surface of the substrate, the post being formed of the single crystal of silicon;
• a table fixed along a plane generally perpendicular to and supported by the post and having a reflective surface facing away from the surface of the substrate and a second surface facing the surface of the substrate, the distance from the surface of the substrate to the second surface of the table being less than the length of the post;
• and
• an actuator positioned on the surface of the substrate adjacent the second surface of the table and structured so as to be able to selectively position the table by applying an actuating force to the table
• wherein the post is sufficiently flexible to allow the reflective surface to be selectively moveable and positionable by the actuator.

A method of making an array of moveable micromirrors, the method including:

• deep etching a silicon substrate so as to form posts surrounded by trenches;
• etching back the surface of the substrate around the posts so as to allow the posts to protrude beyond the surface of the substrate;
• and
• affixing a mirror to the top of a plurality of the posts along a plane generally perpendicular to the posts.