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US 6,734,770 B2Granted
Microrelay
AssigneeInfineon Technologies AG
InventorsRobert Aigner, Sven Michaelis, Florian Plötz
Life of this patent
Estimating the term…
Abstract
A microrelay has a switching part which is pivotably suspended on a substrate and can be moved into two alternative switching states like a rocker, by electrostatic attraction through the use of suitably attached electrodes. The switching function is brought about by electrodes which are fastened to the substrate above the rocker being shorted by metallizations or contact electrodes on an upper side of the switching part.
Claims11
An electrostatically operating microrelay, comprising:
- a substrate, said substrate having a contact electrode and two actuator electrodes attached to said substrate, said contact electrode having two parts provided with separate electrical terminals;
- a switching part movably attached to said substrate, said switching part having a side facing away from said substrate, a contact electrode attached on said side and an actuator electrode attached to said switching part, said switching part acting as a rocker moving between two alternative switching positions;
- said two actuator electrodes attached to said substrate being disposed relative to said actuator electrode attached to said switching part to bring about a rocking movement of said switching part from one of said two alternative switching positions into another of said two alternative switching positions by alternately applying an electric potential to said two actuator electrodes attached to said substrate;
- and
- said contact electrode attached to said substrate being disposed at said side of said switching part facing away from said substrate, permitting said contact electrode attached to said switching part to short said two parts of said contact electrode attached to said substrate in one of said switching positions.
2 more elements
An electrostatically operating microrelay, comprising:
- a substrate, said substrate having a contact electrode and two actuator electrodes attached to said substrate, said contact electrode having two parts provided with separate electrical terminals;
- a switching part movably attached to said substrate, said switching part having a side facing away from said substrate, a contact electrode attached on said side and an actuator electrode attached to said switching part, said switching part acting as a rocker moving between two alternative switching positions;
- said actuator electrodes attached to said substrate being disposed on said side of said switching part facing away from said substrate, said two actuator electrodes attached to said substrate being disposed relative to said actuator electrode attached to said switching part to bring about a rocking movement of said switching part from one of said two alternative switching positions into another of said two alternative switching positions by alternately applying an electric potential to said two actuator electrodes attached to said substrate;
- said contact electrode attached to said substrate being disposed at said side of said switching part facing away from said substrate, permitting said contact electrode attached to said switching part to short said two parts of said contact electrode attached to said substrate in one of said switching positions;
- and
- at least one of said actuator electrodes disposed on said side of said switching part facing away from said substrate being bridge-shaped and spanning said switching part.
3 more elements
An electrostatically operating microrelay, comprising:
- a substrate, said substrate having a contact electrode and two actuator electrodes attached to said substrate, said contact electrode having two parts provided with separate electrical terminals;
- a switching part movably attached to said substrate, said switching part having a side facing away from said substrate, a contact electrode attached on said side and an actuator electrode attached to said switching part, said switching part acting as a rocker moving between two alternative switching positions;
- at least one of said actuator electrodes attached to said substrate being disposed between said substrate and said switching part and at least one of said actuator electrodes attached to said substrate being disposed on said side of said switching part facing away from said substrate, said two actuator electrodes attached to said substrate being disposed relative to said actuator electrode attached to said switching part to bring about a rocking movement of said switching part from one of said two alternative switching positions into another of said two alternative switching positions by alternately applying an electric potential to said two actuator electrodes attached to said substrate;
- said contact electrode attached to said substrate being disposed at said side of said switching part facing away from said substrate, permitting said contact electrode attached to said switching part to short said two parts of said contact electrode attached to said substrate in one of said switching positions;
- and
- at least one of said actuator electrodes disposed on said side of said switching part facing away from said substrate being bridge-shaped and spanning said switching part.
3 more elements
Dependencies are inferred from the claim text.