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US 6,733,679 B2Granted
Method of treating an electroless plating waste
AssigneeIntel Corporation
InventorsValery M. Dubin, Chin-Chang Cheng, Christopher D. Thomas
Life of this patent
Estimating the term…
Abstract
A method of treating an electroless plating waste is provided. The waste is contained and an ability of a reducing agent to reduce a metal of the waste is decreased, for example by adding a stabilizing chemical or by exposing the waste to an anode to which a positive voltage is applied. Poisonous and explosive gases evolve from the waste, which are vented. Upon completion, the waste is drained.
Claims18
A method of treating an electroless plating waste, comprising:
- containing the waste in a container, the waste including a metal and a reducing agent;
- decreasing an ability for the reducing agent to reduce the metal by adding an acid to the waste, resulting in a decrease in pH of the waste, decomposition of the reducing agent, and release of a gas from the waste in the container at a rate which is higher than without the decrease in the ability for the reducing agent to reduce the metal, the gas being contained in an enclosed volume;
- exhausting the gas from the enclosed volume;
- and
- draining the waste from the container.
2 more elements
A method of treating an electroless plating waste, comprising:
- containing the waste in a container, the waste including a metal and a reducing agent which tends to reduce the waste;
- adding at least one stabilizing chemical to the waste in the container, the at least one stabilizing chemical being selected to (i) decrease the ability of the reducing agent to reduce the metal, and (ii) cause release of a gas from the waste at a rate which is higher than without the at least one stabilizing chemical, the gas being contained in an endosed volume above a surface of the waste in the container;
- agitating the waste in the container;
- exhausting the gas from the enclosed volume;
- detecting the concentration of the gas in the enclosed volume;
- and
- draining the waste from the container, once the concentration of the gas falls below a predetermined limit.
4 more elements
Dependencies are inferred from the claim text.