Method for global automated process control
AssigneeInsyst Ltd.
InventorsArnold J. Goldman, Jehuda Hartman, Joseph Fisher, Shlomo Sarel
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AssigneeInsyst Ltd.
InventorsArnold J. Goldman, Jehuda Hartman, Joseph Fisher, Shlomo Sarel
Estimating the term…
A method and system to enhance yield in multi-process manufacturing. The method comprising the translation of a performance parameter of a product into input variables to operate tools carrying our cooperating processes which built a structural element which determines the performance parameter, wherein the individual tools are process controlled. The method further comprising the integration of process control of individual separate processes or of stages in a process, into a combined and comprehensive (modular) process control in which the process parameters of a process are enslaved to accomplish the target output of the final process. Hence target output values of intermediate processes are dynamically reassigned during the manufacturing with respect to their initially designed values, in accordance with the output of their cooperating processes.
A method for controlling a quality of a product during product manufacturing, wherein the manufacturing includes a plurality of modular manufacturing processes, each process among the plurality of modular manufacturing processes having an assigned value setting a process target output, the method comprising the steps of:
Dependencies are inferred from the claim text.