XY table for a semiconductor manufacturing apparatus

An XY table for a semiconductor manufacturing apparatus, in which a first linear drive unit for driving a first drive body in a first direction by means of a first motor main body and a second drive unit for driving a second linear drive body in a second direction by means of a second motor main body are disposed so that said first linear direction and said second linear direction intersect at right angles in a horizontal plane, wherein said XY table comprises:

• a lower table fixed to said first chive body, and
• an upper table fixed to aid second drive body, wherein
• said upper table is supported movably in said second linear direction and immovably in said first linear direction on said lower table,
• said first drive body is immovable in said second linear direction with respect to said first motor main body,
• said second drive body is movable in said first linear direction with respect to said second motor main body, and
• said second motor main body is provided with a magnetic field fanning means that covers an entire region of movement of a magnetic action component of said second drive body in maid first linear direction;
• and wherein
• when said first drive body is driven, said first motor main body is movable in an opposite linear direction from said first drive body;
• and
• when said second drive body is driven, said second motor main body is movable in an opposite linear direction from said second drive body, so that
• a reaction force produced by driving said first drive body and second drive body is canceled out.