Flow pickup circuit
AssigneeMKS Instruments, Inc.
InventorStefan Luchner
Life of this patent
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AssigneeMKS Instruments, Inc.
InventorStefan Luchner
Estimating the term…
A flow pickup circuit for receiving a flow signal from a flow sensor and providing a flow indicator signal corresponding to flow characteristics through the flow sensor includes an inner bridge circuit, an outer bridge circuit, and a processor. The inner bridge circuit operates in a constant current mode, and produces a first sensing signal. The inner bridge circuit includes four components connected in a series loop, two of which include the flow sensor. The outer bridge circuit operates in a constant temperature mode, and produces a second sensing signal. The outer bridge circuit includes four components connected in a series loop, one of which includes the inner bridge circuit. The processor receives the first sensing signal and the second sensing signal, and produces the flow indicator signal therefrom. The processor subtracts an ambient temperature component from the second sensing signal to produce a constant temperature flow indicator.
A flow pickup circuit for receiving a flow signal from a flow sensor and providing a flow indicator signal corresponding to flow characteristics through the flow sensor, comprising:
A method of receiving a flow signal from a flow sensor and providing a flow indicator signal corresponding to flow characteristics through the flow sensor, comprising:
A flow pickup circuit for receiving a flow signal from a flow sensor and providing a flow indicator signal corresponding to flow characteristics through the flow sensor, comprising:
A flow pickup circuit for receiving a flow signal from a flow sensor and providing a flow indicator signal corresponding to flow characteristics through the flow sensor, comprising:
Dependencies are inferred from the claim text.