Loading patent…
AssigneeAdvanced Micro Devices, Inc.
InventorsAlexander J. Pasadyn, Anthony J. Toprac
Estimating the term…
A method for processing an interrupted workpiece includes providing a dynamic control model defining the processing characteristics of a processing tool throughout a processing run; providing a partially processed workpiece; determining an extent of processing metric for the partially processed workpiece; and determining at least one operating recipe parameter of the processing tool based on the dynamic control model and the extent of processing metric. A manufacturing system includes a processing tool and a process controller. The processing tool is adapted to process a partially processed workpiece in accordance with an operating recipe. The process controller is adapted to determine an extent of processing metric for the partially processed workpiece and determine at least one parameter of the operating recipe based on a dynamic control model defining the processing characteristics of the processing tool throughout a processing run and the extent of processing metric.
A method for processing an interrupted workpiece, comprising:
A method for processing an interrupted workpiece, comprising:
A manufacturing system, comprising:
A manufacturing system, comprising:
A manufacturing system, comprising
Dependencies are inferred from the claim text.