X-ray optical system
AssigneeFraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V.
InventorThomas Holz
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Abstract
An X-ray optical system with an X-ray source, an element that focuses the X-rays and an element that reflects them. In order to generate parallel X-radiation with small beam cross-section and high photon density, the X-radiation of the X-ray source is directed with its focusing element to the convex, parabolic and reflecting surface of the reflecting element. The X-ray optical system is useful for X-ray analysis, e.g., in X-ray diffractometry, reflectometry and/or fluorescence analysis.
Claims10
An X-ray optics arrangement comprising an X-ray source, one element focusing X-rays and one element reflecting X-rays for the generation of a parallel X-radiation having a small beam cross section of high photon flux density, wherein said X-radiation of said X-ray source is directed with said focusing element upon a convex, parabolic and reflecting surface of the reflecting element, and wherein a multilayer system is provided on the surface of said reflecting element, the multilayer system including multiple layers, individual ones of which multiple layers are gradient layers, said X-radiation being directed upon said reflecting element with an angle≦critical angle Θc of the total reflection.
An X-ray optics arrangement comprising an X-ray source, one element focusing X-rays and one element reflecting X-rays for the generation of a parallel X-radiation having a small beam cross section of high photon flux density, wherein said X-radiation of said X-ray source is directed with said focusing element upon a convex, parabolic and reflecting surface of the reflecting element, and wherein a multilayer system is provided on the surface of said reflecting element, the multilayer system including multiple layers, individual ones of which multiple layers are gradient layers, said X-radiation having angles of incidence Θi being directed upon said multilayer system having gradient layers such that with a predeterminable wavelength of X-radiation the BRAGG relationship is met on each surface element of the reflecting element.
Dependencies are inferred from the claim text.