# US 6,724,517 B2 · Deformable mirror

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- Number: US 6,724,517 B2
- Document ID: US6724517B2
- Status: Granted
- Kind: B2
- Application number: 10/315,679
- Filed: 2002-12-10
- Published: 2003-06-12
- Granted: 2004-04-20
- Earliest claimed: 2001-12-12
- Assignees: Diehl Munitionssysteme GmbH & Co. KG
- Inventors: Klaus Bär; Berndt Warm
- Web page: https://patentgrep.com/patent/US6724517B2

## CPC

- G02B 26/0825: {the reflecting element being a flexible sheet or membrane, e.g. for varying the focus (flexible mirrors for cosmetic use A45D42/24)}
- G02B: OPTICAL ELEMENTS, SYSTEMS OR APPARATUS

## Abstract

A deformable mirror (10) with an at least quasi-continuously deformable optically effective surface (12) has a floatingly supported mirror plate (11) which is positioned along its edge by a portion of the adjusting members (14.1), whereas the other portion of the adjusting members (14.2) locally individually deforms the mirror plate (11) for the purposes of wave front correction. In that respect all adjusting members (14.1, 14.2) are fixed to the rear side (13) of the mirror plate (11), with a coupling portion (11) which is provided with a desired-flexion location (constriction (25)).

## Claims

### Claim 1

A deformable mirror (10) having an at least quasi-continuously deformable optically effective surface (12) and a plurality of electrically actuable adjusting members (14.1, 14.2) which engage behind its surface (12) and which are arranged in a housing (15), characterised in that the mirror plate (11) is supported in contact-free manner at an open end face of the housing (15) along its edge by a group of at least three adjusting members (14.1), a slot being provided between the mirror plate (11) and the housing (15) or an annular aperture member (24) in the edge region of said mirror plate (11), said slot (23) being in the form of a gap for the discharge of a small amount of cooling fluid which has been introduced into the interior of the housing (15) and which moreover is blown out of the housing (15) through an opening (22) which is directed in such a way that laser beam reflection on the mirror surface (12) is not influenced by the departing fluid.

### Claim 2 (depends on 1)

A mirror according to claim 1 characterised in that a front coupling portion (18) is inserted between the rear side (13) of the mirror plate (11) and each adjusting member (14.1, 14.2) and permanently connected to both.

### Claim 3 (depends on 2)

A mirror according to claim 2 characterised in that the front coupling portion (18) has a constriction (25) as a desired-flexion location.

### Claim 4 (depends on 3)

A mirror according to claim 3 characterised in that each adjusting member (14.1, 14.2) is permanently connected to a rear holding portion (17).

### Claim 5 (depends on 4)

A mirror according to claim 4 characterised in that each rear holding portion (17) is provided with a female screwthread.

### Claim 6 (depends on 4)

A mirror according to claim 4 characterised in that the permanent connections are made by adhesive.

### Claim 7 (depends on 6)

A mirror according to claim 6 characterised in that a base component (16) is in the form of a solid plate on which the housing (15) is arranged in the form of a hollow cylinder and which has holding holes (20) through which screw shanks engage into the rear holding portions (17).

### Claim 8 (depends on 7)

A mirror according to claim 7 characterised in that the rear holding portions (17) are axially braced by means of the screw shanks against screw heads on the oppositely disposed side of the solid plate-shaped base component (16).

### Claim 9 (depends on 1)

A mirror according to claim 1 characterised in that the adjusting members (14.1, 14.2) are in the form of piezo-columns.

### Claim 10 (depends on 1)

A mirror according to claim 1 characterised in that the peripherally extending edge region of the mirror plate (11) is determined by having said aperture member (24) fixed with respect to the housing engaging radially thereover.