Robust multi-layered thin-film membrane for micro-electromechanical systems (MEMS) photonic devices
AssigneeINTPAX, Inc.
InventorsGaofeng Wang, Naiqian Han, Liji Huang
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Abstract
This invention discloses a configuration of thin-film membrane. This thin-film membrane is freestanding, movable, and made of multiple layers of different materials such as silicon nitride, polycrystalline silicon or the combination of these two. This thin-film membrane can be actuated by external controlling forces such as electrostatic force. This thin-film membrane consists of odd number of layers, e.g., 1 layer, 3 layers, 5 layers, . . . , etc. Moreover, the layer profile of this membrane is symmetric, e.g., the bottommost layer is made to be identical to the topmost layer, the next bottommost layer is made to be identical to the next topmost layer, so on and so forth.
Claims20
An optical device comprising:
- a deformable membrane comprising a plurality of thin-film layers represented by L(i), i=1, 2, 3, . . . , N where N is a positive odd integer;
- and
- said deformable membrane having a mirror symmetrical layer structure relative to a middle layer L(m) where m=(N+1)/2, and layer L(m−j) and layer L(m+j) having a same stress response-characteristic during a membrane deformation, where j=1, 2, 3, . . . ,(N−1)/2.
A deformable membrane manufactured by a micro-opto-electromechanical-system (MOEMS) technology comprising:
- a plurality of thin-film layers represented by L(i), i=1, 2, 3, . . . , N where N is a positive odd integer;
- and
- said thin film layers having a mirror symmetrical layer structure relative to a middle layer L(m) where m=(N+1)/2, and layer L(m−j) and layer L(m+j) having a same stress response-characteristic during a membrane deformation where j=1, 2, 3, . . . ,(N−1)/2.
An method for manufacturing an optical device comprising:
- forming a deformable membrane with a plurality of thin-film layers represented by L(i), i=1, 2, 3, . . . , N where N is a positive odd integer;
- and
- configuring said thin film layers with a mirror symmetrical layer structure relative to a middle layer L(m) where m=(N+1)/2, and layer L(m−j) and layer L(m+j) having a same stress response-characteristic during a membrane deformation, where j=1, 2, 3, . . . ,(N−1)/2.
A method of forming a deformable membrane by using a micro-opto-electromechanical-system (MOEMS) technology comprising:
- forming a plurality of thin-film layers represented by L(i), i=1, 2, 3, . . . , N where N is a positive odd integer;
- and
- configuring said thin film layers with a mirror symmetrical layer structure relative to a middle layer L(m) where m=(N+1)/2, and layer L(m−j) and layer L(m+j) having a same stress response-characteristic during a membrane deformation, where j=1, 2, 3, . . . ,(N−1)/2.
Dependencies are inferred from the claim text.