Cluster tool reporting system
AssigneeLSI Logic Corporation
InventorsThomas C. Hann, Jr., Mark D. Meyer, Theodore O. Meyer
Life of this patent
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AssigneeLSI Logic Corporation
InventorsThomas C. Hann, Jr., Mark D. Meyer, Theodore O. Meyer
Estimating the term…
A method for determining an up time of a multi-component tool having discrete elements, where the up time determination is based upon different processes that are to be accomplished in the multi-component tool. The discrete elements of the multi-component tool and the different processes to be accomplished in the multi-component tool are identified. Different tool states for the multi-component tool are determined by setting element states for each of the discrete elements of the multi-component tool. A first possible element state indicates that the discrete element is functional, and a second possible element state indicates that the discrete element is nonfunctional. Possible combinations of the element states of the discrete elements are identified as the different tool states of the multi-component tool. A determination is made as to which of the different processes can be accomplished in the different tool states, and a percentage of time usage is determined for the allocation of the multi-component tool to each of the different processes. Rates associated with combinations of the different tool states with the different processes are determined. Process state efficiencies are determined from the rates and the percent of time usage allocated to the processes associated with the rates. A preliminary state efficiency for the different tool states is determined from the process state efficiencies associated with the different tool states. Percent of time conditions are determined for the different tool states, where the percent of time conditions represent ratios of time that the multi-component tool exhibits the associated tool state. The final state efficiencies for the different tool states are determined from the percent of time conditions and the preliminary state efficiencies associated with the different tool states, and the up time is determined from the final state efficiencies.
A method for determining an up time of a multi-component tool having discrete elements based upon different processes that are to be accomplished in the multi-component tool, comprising the steps of:
A program on a computer readable media, the program comprising computer executable instruction statements operable to instruct the computer to determine an up time of a multi-component tool having discrete elements based upon different processes that are to be accomplished in the multi-component tool, the computer executable instruction statements operable to:
A computerized system to determine an up time of a multi-component tool having discrete elements based upon different processes that are to be accomplished in the multi-component tool, the computerized system comprising:
Dependencies are inferred from the claim text.