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US 6,724,199 B1Granted
Pin and cup devices for measuring film thickness
AssigneeOhio University
InventorsBharat Bhushan, Christopher D. Hahm
Life of this patent
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Abstract
Capacitive film thickness measurement devices and measurement systems used in machines or instruments. A capacitance measurement device and technique useful in determining lubricant film thickness on substrates such as magnetic thin-film rigid disks. Variations in lubricant thickness on the Angstrom scale or less may be measured quickly and nondestructively.
Claims2
A capacitance measurement probe comprising:
- (a) a conductive pin;
- (b) a hollow liquid-impermeable slider housing about a portion of said conductive pin;
- and
- (c) a dielectric liquid contained by said hollow liquid-impermeable slider, said dielectric liquid in contact with said conductive pin.
1 more element
Dependencies are inferred from the claim text.