Surface discharge lamp and system

Abstract

A high intensity discharge lamp includes a dielectric substrate, a first electrode near the dielectric substrate, a second electrode spaced from the first electrode and near the dielectric substrate, with a discharge gas contained and enclosed by a shaped reflector and window. The reflector shapes are adapted to the particular process. The lamp to be used in volumetric chambers with high reflectivity walls and in arrangements of multiple lamps for high processing rates and long penetration lengths. Erosion of the dielectric is controlled by the use of high-pressure gases, and filtration and the use of electric fields reduce lamp contamination. The dielectric and electrodes are gas cooled on the outside and through the use of perforated electrodes. A small diameter tubular dielectric is used to increase light emission, improve re-imaging capability and increase the electrical impedance.

Dependencies are inferred from the claim text.