Laminated piezoelectric element, method for manufacturing the same, and piezoelectric actuator
AssigneeMurata Manufacturing Co., Ltd.
InventorHiroshi Nakatani
Life of this patent
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Abstract
A laminated piezoelectric element includes a second connecting internal electrode electrically connected to a common external electrode that is located in a bottom portion, which lies below the bottoms of slits, of a monolithic piezoelectric body, and the second connecting internal electrode is spaced away from and substantially parallel to the first and second driving internal electrodes. In the laminated piezoelectric element, a notch is formed on a side surface of the monolithic piezoelectric body, having a driving external electrode and a connecting external electrode disposed thereon, and a conducting external electrode is disposed on the side surface of the notch, having an end of the second internal electrode exposed thereat.
Claims16
A laminated piezoelectric element, comprising:
- a monolithic piezoelectric body having at least one slit;
- and
- a plurality of independently driven actuator units, the monolithic piezoelectric body including:
- a driver;
- and
- a connector, the driver including:
- a plurality of first driving internal electrodes;
- and
- a plurality of second driving internal electrodes, the first and second driving internal electrodes alternatively laminated therein, and the connector comprising:
- a plurality of first connecting internal electrodes laminated therein, the monolithic piezoelectric body further including:
- a driving external electrode;
- a connecting external electrode, the driving and connecting external electrodes disposed substantially parallel to each other on one of the mutually opposing side surfaces of the monolithic piezoelectric body and electrically connected to at least the first driving internal electrodes and the first connecting internal electrodes, respectively;
- a common external electrode disposed on the other of the mutually opposing side surfaces of the monolithic piezoelectric body and electrically connected to at least both the second driving internal electrodes and the first connecting internal electrodes;
- and
- a second connecting electrode being electrically connected with the common external electrode;
- wherein
- the silt extends from the upper surface toward the lower surface of the monolithic piezoelectric body in the laminating direction of the same, the actuator units are defined by the slit dividing the driving internal electrodes and the driving external electrode, and the second connecting internal electrode is disposed at a bottom portion, which lies below the bottom edge of the slit, of the monolithic piezoelectric body, and is spaced away from and substantially parallel to the first and second driving internal electrodes.
Dependencies are inferred from the claim text.