Piezoelectric/electrostrictive device
AssigneeNGK Insulators, Ltd.
InventorsYukihisa Takeuchi, Takao Ohnishi, Koji Kimura
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AssigneeNGK Insulators, Ltd.
InventorsYukihisa Takeuchi, Takao Ohnishi, Koji Kimura
Estimating the term…
A piezoelectric/electrostrictive device including a substrate and a connection plate having a first end joined to the substrate and an opposed second end extending along a first direction, and first and second opposed sides along a second direction perpendicular to the first direction. A fixing plate is joined to the second end of the connection plate. A first side of a first diaphragm is joined to the first side of the connection plate and an opposed second side of the first diaphragm is joined to the substrate. A first side of a second diaphragm is joined to the substrate and an opposed second side of the second diaphragm is joined to the second side of the connection plate. A piezoelectric/electrostrictive element is provided on at least a portion of at least one planar surface of at least one of the diaphragms.
A piezoelectric/electrostrictive device comprising:
Dependencies are inferred from the claim text.