# US 6,724,067 B2 · Low stress thermal and electrical interconnects for heterojunction bipolar transistors

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- Number: US 6,724,067 B2
- Document ID: US6724067B2
- Status: Granted
- Kind: B2
- Application number: 10/265,548
- Filed: 2002-10-07
- Published: 2003-02-27
- Granted: 2004-04-20
- Earliest claimed: 2001-04-13
- Assignees: Anadigics, Inc.
- Inventors: Burhan Bayraktaroglu
- Web page: https://patentgrep.com/patent/US6724067B2

## CPC

- H10W 20/484: {Interconnections having extended contours, e.g. pads having mesh shape or interconnections comprising connected parallel stripes}
- H10D 10/821: {Vertical heterojunction BJTs}
- H10D 64/231: {Emitter or collector electrodes for bipolar transistors}
- H10D 84/01: Manufacture or treatment
- H10D 84/05: using Group III-V technology
- H10W 20/483: {Interconnections over air gaps, e.g. air bridges}
- H10W: GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10D: INORGANIC ELECTRIC SEMICONDUCTOR DEVICES

## Abstract

A thermal and electrical interconnect for heterojunction bipolar transistors is disclosed wherein the interconnect is essentially comprised of gold and in thermal and electrical contact with each of the interdigitated emitter fingers and is capable of transporting heat fluxes between 0.25-1.5 mW/μm2. The interconnect is electrodeposited to form a low-stress interface with the emitter finger, thereby increasing the lifetime and reliability of the transistor.

## Claims

### Claim 1

An interconnect for a heterojunction bipolar transistor having interdigitated emitter and base fingers wherein the interconnect is essentially comprised of gold having a thickness greater than 1 micrometers, the interconnect in thermal and electrical contact with at least two of the emitter fingers and forming a bridge over each of the base fingers thereby maintaining electrical insulation between the base and emitter with a low emitter-base capacitance, wherein the interconnect is electrodeposited such that residual stress in the interconnect is low, wherein the bridge is an air bridge.

### Claim 2

An interconnect for a heterojunction bipolar transistor having at least two emitter fingers, the interconnect comprising: a first air bridge in thermal and electrical contact with at least two emitter fingers, wherein the first air bridge is electrodeposited to a thickness greater than 1 micrometers; and a second air bridge in thermal and electrical contact with each of the emitter fingers and a lead pad.

### Claim 3 (depends on 2)

The interconnect of claim 2 wherein the interconnect is comprised essentially of electrodeposited gold.

### Claim 4 (depends on 2)

The interconnect of claim 2 wherein the interconnect is contacted to a middle portion of an emitter finger, the middle portion characterized by a contact width and contact length, each emitter finger characterized by a emitter width and emitter length.

### Claim 5 (depends on 4)

The interconnect of claim 4 wherein the contact width is in a range selected from the group consisting of 0.3-1.0 the emitter finger width, 0.40-0.9 the emitter finger width, and 0.5-0.75 the emitter finger width.

### Claim 6 (depends on 4)

The interconnect of claim 4 wherein the contact width is in a range selected from the group consisting of 0.3-0.4 emitter finger width, 0.4-0.5 emitter finger width, 0.5-0.6 emitter finger width, 0.6-0.7 emitter finger width, 0.7-0.8 emitter finger width, 0.8-0.9 emitter finger width, and 0.9-1.0 the emitter finger width.

### Claim 7 (depends on 4)

The interconnect of claim 4 wherein the contact length is in a range selected from the group consisting of 0.3-1.0 the emitter finger length, 0.40-0.9 the emitter finger length, and 0.5-0.75 the emitter finger length.

### Claim 8 (depends on 4)

The interconnect of claim 4 wherein the contact length is in a range selected from the group consisting of 0.3-0.4 emitter finger length, 0.4-0.5 emitter finger length, 0.5-0.6 emitter finger length, 0.6-0.7 emitter finger length, 0.7-0.8 emitter finger length, 0.8-0.9 emitter finger length, and 0.9-1.0 the emitter finger length.

### Claim 9 (depends on 2)

The interconnect of claim 2 wherein the average interconnect thickness is in a range selected from the group consisting of about 1-15 μm, about 2-8.5 μm, about 3-6.5 μm, about 1-3 μm, about 3-6 μm about 6-10 μm, and about 10-15 μm.

### Claim 10 (depends on 2)

The interconnect of claim 2 wherein the heat flux transported through the interconnect is in a range selected from the group consisting of at least 0.25 mW/μm2, 0.25-0.5 mW/μm2, 0.5-1.0 mW/μm2, 1.0-1.5 mW/μm2, and greater than 1.5 mW/μm2.

### Claim 11 (depends on 2)

The interconnect of claim 2 formed by the steps of:
providing an HBT comprising an intrinsic device, a base ledge, and a dielectric passivation layer between an emitter contact and a base contact;
establishing a post resist pattern characterized by a post resist thickness;
depositing a seed metal over the post resist pattern;
depositing a thick photoresist covering a portion of the seed metal, an uncovered portion of the seed metal defining a bridge area;
plating gold on the uncovered portion of the seed metal forming the interconnect.

### Claim 12 (depends on 11)

The interconnect of claim 11 further comprising the step of removing the photoresist after the step of plating gold.

### Claim 13 (depends on 12)

The interconnect of claim 12 further comprising the step of removing the seed metal.

### Claim 14 (depends on 11)

The interconnect of claim 11 further comprising the step of removing the post resist after the step of plating gold.

### Claim 15 (depends on 11)

The interconnect of claim 11 wherein the post resist pattern defines a first interconnect connecting an emitter finger to a second emitter finger.

### Claim 16 (depends on 15)

The interconnect of claim 15 wherein the post resist pattern defines a second interconnect connecting the emitter finger to a lead pad.

### Claim 17 (depends on 11)

The interconnect of claim 11 wherein plating gold further comprises electroplating by pulse doping.