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US 6,724,061 B2Granted
Optical device and method of manufacture thereof, and electronic instrument
AssigneeSeiko Epson Corporation
InventorAkihiro Murata
Life of this patent
Estimating the term…
Abstract
The invention provides an optical device having an optical element, a substrate, and a flexible member. A first portion of the flexible member is disposed so as to be spaced from the substrate, a second portion surrounding the first portion is adhered to the substrate, and a closed space is defined between the first portion and the substrate. The optical element is mounted on the substrate within the closed space.
Claims36
An optical device, comprising:
- a substrate;
- a flexible member having a first portion disposed so as to be spaced from the substrate, and a second portion surrounding the first portion and adhered to the substrate, a closed space being defined between the first portion and the substrate;
- and
- an optical element disposed within the closed space, having a top touching the first portion of the flexible member and mounted to the substrate,
- wherein the first portion is curved continuously from its part touching the optical element to the second portion so as to be depressed into the closed space, and the first portion is curved at its part opposed to a side of the optical element.
2 more elements
An optical device, comprising:
- a substrate;
- a flexible member having a first portion disposed so as to be spaced from the substrate, and a second portion surrounding the first portion and adhered to the substrate, a closed space being defined between the first portion and the substrate, the closed space being filled with an inert gas, the substrate defining a hole opening to the closed space and being blocked at a surface opposite to the closed space, the hole defined in the substrate being blocked by a valve;
- and
- an optical element disposed within the closed space, and mounted to the substrate.
1 more element
An optical device, comprising:
- a substrate;
- a flexible member having a first portion disposed so as to be spaced from the substrate, and a second portion surrounding the first portion and adhered to the substrate, a closed space being defined between the first portion and the substrate, a pressure in the closed space being closer to a pressure in a vacuum than atmospheric pressure, the substrate defining a hole opening to the closed space and being blocked at a surface opposite to the closed space, the hole defined in the substrate being blocked by a valve;
- and
- an optical element disposed within the closed space, and mounted to the substrate.
1 more element
An optical device, comprising:
- a substrate;
- a flexible member having a first portion disposed so as to be spaced from the substrate, and a second portion surrounding the first portion and adhered to the substrate, a closed space being defined between the first portion and the substrate;
- and
- an optical element disposed within the closed space, having a top touching the first portion of the flexible member and mounted to the substrate,
- wherein the first portion is outwardly curved continuously from its part touching the optical element to the second portion, and the first portion is curved at its part opposed to a side of the optical element.
2 more elements
Dependencies are inferred from the claim text.