# US 6,724,047 B2 · Body contact silicon-on-insulator transistor and method

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- Number: US 6,724,047 B2
- Document ID: US6724047B2
- Status: Granted
- Kind: B2
- Application number: 10/352,211
- Filed: 2003-01-28
- Published: 2003-06-19
- Granted: 2004-04-20
- Earliest claimed: 1999-12-10
- Assignees: Texas Instruments Incorporated
- Inventors: Sreenath Unnikrishnan
- Web page: https://patentgrep.com/patent/US6724047B2

## CPC

- H10D 30/0323: {comprising monocrystalline silicon}
- H10D 30/6711: {by using electrodes contacting the supplementary regions or layers}
- H10D 30/673: {characterised by the shapes, relative sizes or dispositions of the gate electrodes}
- H10D 62/378: {Contact regions to the substrate regions}
- H10D: INORGANIC ELECTRIC SEMICONDUCTOR DEVICES

## Abstract

A method for fabricating a body contact silicon-on-insulator transistor (10) includes forming a semiconductor substrate (12) over an insulator (14) and lightly doping the semiconductor substrate (12) to form a body region (18). The method also includes forming a gate (20) over the semiconductor substrate (12) and separated from the semiconductor substrate (12) by a gate insulator layer (21). The gate (20) defines a source region (22), a drain region (24) and a contact region (26). The method also includes masking a portion (36) of the gate (20) and the contact region (26) and heavily doping the source region (22), the drain region (24) and an unmasked portion (36) of the gate (20) with a material having a conductivity substantially opposite a conductivity of the body region (18).

## Claims

### Claim 1

A body contact transistor, comprising:
a body region of a first conductivity type formed over an insulator;
a source region and a drain region, each of a second conductivity type substantially opposite the first conductivity type, formed adjacent the body region; and
a gate formed on an upwardly facing surface of the body region and separated from the upwardly facing surface of the body region by a gate insulator layer, the gate having a doped portion of a third conductivity type disposed adjacent the source region and the drain region, the third conductivity type substantially opposite to the first conductivity type, the gate having an undoped portion disposed at an end of the gate and adjacent a contact region, the contact region coupled to the body region.

### Claim 2 (depends on 1)

The method of claim 1, wherein the contact region comprises a fourth conductivity type substantially equal to the first conductivity type.

### Claim 3 (depends on 1)

The method of claim 1, wherein the contact region comprises a heavily doped region of a fourth conductivity type, the fourth conductivity type substantially opposite to the second conductivity type.

### Claim 4 (depends on 1)

The method of claim 1, wherein the undoped portion of the gate is disposed substantially perpendicular to the doped portion of the gate.

### Claim 5 (depends on 1)

The method of claim 1, wherein the contact region is disposed adjacent a periphery of the gate.

### Claim 6 (depends on 1)

The method of claim 1, wherein the gate comprises a first region and a second region, the first region disposed between the source region and the drain region, and wherein the second region is disposed substantially perpendicular to and at one end of the first region, and wherein the first region comprises the doped portion of the gate.

### Claim 7 (depends on 1)

The method of claim 1, further comprising a silicide layer formed on an upwardly facing surface of the gate.