Reaction frame apparatus and method

A stage assembly, comprising:

• a stage guided movably in at least a first direction;
• a first reaction frame portion of a reaction frame, the first reaction frame coupled to ground in the first direction by a first ground rod aligned along the longitudinal side of the first reaction frame portion;
• a second reaction frame portion of the reaction frame not coupled directly to ground in the first direction;
• and
• an interconnect rod passing parallel to the plane defined by the first reaction frame portion and second reaction frame portion having a first end and a second end with a damper therebetween, wherein the first end is coupled to the first reaction frame portion and the second end is coupled to the second reaction frame portion and reaction forces from the stage moving in the first direction received by the second reaction frame portion are transferred to ground through the interconnect rod and the first reaction frame portion.

A method of processing reaction forces from a stage, comprising:

• providing a first reaction frame portion of a reaction frame;
• alligning a ground rod attached to ground and coupled along the longitudinal side of the first reaction frame;
• providing a second reaction frame portion of the reaction frame;
• and
• interconnecting the first reaction frame portion and second reaction frame portion together with an interconnect rod passing parallel to the plane defined by the first reaction frame portion and second reaction frame portion having a damper along the length of the interconnect rod wherein reaction forces in the first direction received by the second reaction frame portion are transferred to ground through the combination of the interconnect rod, the damper and the first reaction frame portion.

A stage assembly, comprising:

• a stage guided movably in at least a first direction;
• a first reaction frame portion of the reaction frame coupled to ground in the first direction by a ground rod aligned along the longitudinal side of the first reaction frame;
• a second reaction frame portion of the reaction frame;
• and
• an interconnect rod having a first end and a second end alligned with the ground rod, wherein the first end is coupled to the first reaction frame portion and the second end is coupled to the second reaction frame portion and reaction forces in the first direction received by the second reaction frame portion are transferred to ground through the combination of the interconnect rod and the first reaction frame portion.

A method of processing reaction forces from a stage, comprising:

• providing a first reaction frame portion of a reaction frame;
• alligning a ground rod attached to ground and coupled along the longitudinal side of the first reaction frame;
• providing a second reaction frame portion of the reaction frame not coupled directly to ground in the first direction;
• and
• interconnecting the first reaction frame portion and second reaction frame portion together with an interconnect rod having a first end and a second end alligned with the ground rod, wherein the first end is coupled to the first reaction frame portion and the second end is coupled to the second reaction frame portion and reaction forces in the first direction received by the second reaction frame portion are transferred to ground through the combination of the interconnect rod and the first reaction frame portion.