Power semiconductor die attach process using conductive adhesive film

A process of connecting semiconductor die to a substrate having a top surface,

• said process comprising the steps of:
• providing a thin, flexible, heat curable, polyimide, insulative film which is of a first area;
• laying said thin flexible film on a semiconductor wafer of a second area, said semiconductor wafer being provided with a plurality of spaced apart semiconductor die, each of said semiconductor die having a respective third area which is substantially less than said first area;
• preheating said semiconductor wafer and said thin flexible film without applying any external pressure to partially cure said thin flexible film, thereby forming adhesion between said thin flexible film and said semiconductor wafer,
• thereafter simultaneously singulating both said thin flexible film and said plurality of identical semiconductor die to form individual elements;
• heating said substrate;
• thereafter placing at least one of said singulated semiconductor die on the top surface of said heated substrate with the thin flexible film on said die pressed against said top surface and adhered thereto;
• and
• thereafter heating said semiconductor die and said substrate to a curing temperature to fully cure said thin flexible film to firmly adhere said semiconductor die to said substrate.