Method of making coated articles with contact layer that is more oxidized further from IR reflecting layer

A method of making a coated article, the method comprising:

• sputtering at least one dielectric layer onto a substrate;
• sputtering a first contact layer over the at least one dielectric layer;
• sputtering a metallic infrared (IR) reflecting layer directly on the first contact layer;
• sputtering a second contact layer directly on the metallic IR reflecting layer in a manner such that the second contact layer is oxidation graded and becomes progressively more oxidized through its thickness away from the IR reflecting layer.

A method of making a coated article, the method comprising:

• providing a glass substrate;
• sputtering both a layer comprising silver and a contact layer on the glass substrate, so that the contact layer comprises a metal oxide and is in direct contact with the layer comprising silver;
• and
• wherein said sputtering of the contact layer which comprises the metal oxide is perfonned so that the contact layer is more oxidized at a location further from the layer comprising silver than at a location closer to the layer comprising silver.