Non-intrusive method and apparatus for characterizing particles based on scattering matrix elements measurements using elliptically polarized radiation

A non-intrusive method of characterizing particles through inverse analysis of experimental data based on measurements using elliptically polarized radiation comprising the steps of:

• compiling a database of theoretical absorption and scattering data sets for particles;
• determining optimum settings for an experimental test to gather an experimental absorption and scattering data set;
• conducting the experimental test to obtain the experimental absorption and scattering data set;
• and
• comparing the experimental absorption and scattering data set to the theoretical absorption and scattering data sets of the database in order to determine an absorption and scattering data set which differs the least from the experimental absorption and scattering data set,
• wherein the step of determining optimum settings for the experimental test to gather the experimental absorption and scattering data set includes estimating characteristics of the particles being characterized, and
• wherein the estimated characteristics of the particles being characterized includes data obtained utilizing a device selected from the group of a transmission electron microscope, a scanning electron microscope, and an atomic force microscope.

A non-intrusive method of characterizing particles through inverse analysis of experimental data based on measurements using elliptically polarized radiation comprising the steps of:

• compiling a database of theoretical absorption and scattering data sets for particles;
• determining optimum settings for an experimental test to gather an experimental absorption and scattering data set;
• conducting the experimental test to obtain the experimental absorption and scattering data set;
• and
• comparing the experimental absorption and scattering data set to the theoretical absorption and scattering data sets of the database in order to determine an absorption and scattering data set which differs the least from the experimental absorption and scattering data set,
• wherein the step of determining optimum settings for the experimental test to gather the experimental absorption and scattering data set includes estimating characteristics of the particles being characterized, and
• wherein the step of determining optimum settings further includes selecting a wavelength of a theoretical elliptically polarized radiation based on said estimated characteristics of the particles being characterized, and selecting a theoretical set of polarizers and retarders each having an optical axis based on the selected wavelength.

A non-intrusive method of characterizing particles through inverse analysis of experimental data based on measurements using elliptically polarized radiation comprising the steps of:

• compiling a database of theoretical absorption and scattering data sets for particles;
• determining optimum settings for an experimental test to gather an experimental absorption and scattering data set;
• conducting the experimental test to obtain the experimental absorption and scattering data set;
• and
• comparing the experimental absorption and scattering data set to the theoretical absorption and scattering data sets of the database in order to determine an absorption and scattering data set which differs the least from the experimental absorption and scattering data set,
• wherein the step of determining optimum settings for the experimental test to gather the experimental absorption and scattering data set includes estimating characteristics of the particles being characterized, and
• wherein the step of determining optimum settings further includes selecting a wavelength of an elliptically polarized radiation based on said estimated characteristics of the particles being characterized, and selecting a set of polarizers and retarders each having an optical axis based on the selected wavelength.

A non-intrusive method of characterizing particles through inverse analysis of experimental data based on measurements using elliptically polarized radiation comprising the steps of:

• compiling a database of theoretical absorption and scattering data sets for particles;
• determining optimum settings for an experimental test to gather an experimental absorption and scattering data set;
• conducting the experimental test to obtain the experimental absorption and scattering data set;
• and
• comparing the experimental absorption and scattering data set to the theoretical absorption and scattering data sets of the database in order to determine an absorption and scattering data set which differs the least from the experimental absorption and scattering data set,
• wherein the step of conducting the experimental test includes directing elliptically polarized radiation having a selected wavelength toward the particles to be characterized, modulating the polarization of the radiation before and after the radiation is incident on the particles to be characterized, detecting radiation scattered by the particles to be characterized at at least one scattering angle, and repeating the steps of directing, modulating, and detecting the elliptically polarized radiation at least one time.

A non-intrusive method of characterizing particles through inverse analysis of experimental data based on measurements using elliptically polarized radiation comprising the steps of:

• compiling a database of theoretical absorption and scattering data sets for particles;
• determining optimum settings for an experimental test to gather an experimental absorption and scattering data set;
• conducting the experimental test to obtain the experimental absorption and scattering data set;
• and
• comparing the experimental absorption and scattering data set to the theoretical absorption and scattering data sets of the database in order to determine an absorption and scattering data set which differs the least from the experimental absorption and scattering data set,
• wherein the steps of conducting the experimental test to obtain the experimental absorption and scattering data set and comparing the experimental absorption and scattering data set to the theoretical absorption and scattering data sets of the database are repeated at least one time.

A non-intrusive method of characterizing particles through inverse analysis of experimental data obtained through measurements made using elliptically polarized radiation having a selected wavelength and based on predetermined optimized settings determined utilizing the selected wavelength utilizing a database of theoretical absorption and scattering data sets for particles comprising the steps of:

• conducting an experimental test utilizing the predetermined optimized settings to obtain an experimental absorption and scattering data set;
• and
• comparing the experimental absorption and scattering data set to the theoretical absorption and scattering data sets of the database in order to determine an absorption and scattering data set which differs the least from the experimental absorption and scattering data set,
• wherein the step of conducting the experimental test includes directing elliptically polarized radiation having the selected wavelength toward the particles to be characterized, modulating the polarization of the radiation before and after the radiation is incident on the particles to be characterized, detecting radiation scattered by the particles to be characterized at at least one scattering angle, and repeating the steps of directing, modulating, and detecting the elliptically polarized radiation at least one time.

An apparatus for characterizing particles through inverse analysis of experimental data based on measurements using elliptically polarized radiation comprising:

• a radiation source for generating elliptically polarized radiation having a wavelength (λ);
• a plurality of polarizers and retarders each having an optical axis an orientation of at least one of the optical axes being adjustable for modulating the elliptically polarized radiation before and after the radiation is incident on the particles;
• at least one detector for detecting radiation scattered by the particles and generating an output;
• a controller for adjusting the orientation of the optical axis of at least one of said polarizers and retarders;
• and
• a processor for receiving the output from said at least one detector, generating an experimental absorption and scattering data set based on the output of said at least one detector, and comparing the experimental absorption and scattering data set to theoretical absorption and scattering data sets in order to determine an absorption and scattering data set which differs the least from the experimental absorption and scattering data set.

An apparatus for characterizing particles through inverse analysis of experimental data based on measurements using elliptically polarized radiation comprising:

• a radiation source for generating elliptically polarized radiation having a wavelength (λ) and directing the elliptically polarized radiation toward the particles;
• a plurality of polarizer and retarder pairs for modulating the elliptically polarized radiation before and after the radiation is incident on the particles;
• at least one detector for detecting radiation scattered by the particles;
• and
• a processor for receiving the output from said at least one detector, generating an experimental absorption and scattering data set based on the output of said at least one detector, comparing the experimental absorption and scattering data set to theoretical absorption and scattering data sets in order to determine an absorption and scattering data set which differs the least from the experimental absorption and scattering data set.