Method and apparatus to provide embedded substrate process monitoring through consolidation of multiple process inspection techniques

A method for inspecting substrates in a system comprising a front-end environment, a transfer chamber, at least one load lock connecting the front-end environment and the transfer chamber, and at least one vacuum chamber connected to the transfer chamber, the method comprising:

• performing a first inspection of a substrate using a first optical inspection system, wherein the first inspection of the substrate comprises:
• transmitting an optical signal onto a surface of the substrate from a transmitter unit during the movement of the substrate between the at least one load lock chamber and the front-end environment;
• and
• receiving a scattered portion of the optical signal at a receiver unit;
• and
• in the event of a predetermined result from performing the first inspection, performing a second inspection of the substrate using a second optical inspection system disposed on a metrology unit connected to the front-end environment.

A substrate processing system, comprising:

• a front-end environment;
• a transfer chamber having a transfer robot disposed therein;
• at least one load lock chamber disposed between the front-end environment and the transfer chamber to provide a substrate transfer passageway therebetween;
• a plurality of vacuum chambers connected to the transfer chamber;
• a first optical inspection system disposed in at least one of the front-end environment and the transfer chamber and configured to perform a first substrate inspection process of the substrate;
• a second optical inspection system connected to the a front-end environment and adapted for performing a second substrate inspection process of the substrate in the event of a predetermined result from the first substrate inspection process;
• and
• a front-end robot disposed in the front-end environment adapted to transfer substrates between the first optical inspection system and the second optical inspection system.