# US 6,720,789 B1 · Method for wafer test and wafer test system for implementing the method > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 6,720,789 B1 - Document ID: US6720789B1 - Status: Granted - Kind: B1 - Application number: 10/366,157 - Filed: 2003-02-13 - Granted: 2004-04-13 - Earliest claimed: 2003-02-13 - Assignees: International Business Machines Corporation - Inventors: David M. Audette; David L. Gardell; John F. Hagios - Web page: https://patentgrep.com/patent/US6720789B1 ## CPC - G01R 31/2886: {Features relating to contacting the IC under test, e.g. probe heads; chucks (G01R31/2865 takes precedence, test connections, e.g. test sockets, or probes per se, G01R1/04 or G01R1/06)} - G01R: MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES (indicating correct tuning of resonant circuits H03J3/12) ## Abstract A method and system for testing wafers, and particularly a wafer test system employing probes to provide for electrical contact with a device under test (DUT) which is located on a wafer. More particularly, also provided is a method and system for implementing wafer tests where the probes first contact a simulated wafer which incorporates an array of spaced load cells to determine the optimum probe overdrive. The DUT is then tested at the optimum overdrive. ## Claims ### Claim 1 A test system for testing devices under test (DUTs) located on a product wafer, said test system comprising: a support plate having a surface with a simulated wafer being arranged thereon, said simulated wafer including a load plate and a plurality of load cells retained in a spaced array interposed between said load plate and said support plate surface; a wafer probe arrangement including a device interface board mounting a plurality of probes being arrayed in opposed relationship to said load cells facing towards said load plate; and movable structure for imparting movement to said support plate for biasing said simulated wafer into contact with said plurality of probes to determine an optimum overdrive for a specific product which results in optimized probe force, said movable structure implementing said optimum overdrive during testing of said DUTs on said product wafer, whereby said probe force for each said probe of the plurality of probes responsive to pressure exerted between said respective load cells and probes is indicative of the plurality of the wafer surface at the final overdrive position for said support plate. ### Claim 2 (depends on 1) A test system as claimed in claim 1, further comprising means for measuring differences in planarity between said simulated wafer and said probes. ### Claim 3 (depends on 2) A test system as claimed in claim 2, wherein said measuring means accounts for planarity differences by monitoring a location of an X-component of the force on the DUT and a location of an Y-component of the force on the DUT, wherein a limit for overdriving said simulated wafer is a function of said measured probe force on said DUT and said X- and Y-components thereof. ### Claim 4 (depends on 2) A test system as claimed in claim 2, wherein said overdrive is determined by a difference between an initial position of said simulated wafer when biased to make initial contact with said probe array, and a final position of said simulated wafer when biased to contact at least probe array such that each said probe is minimally deflected. ### Claim 5 (depends on 1) A test system as claimed in claim 1, wherein said movable structure comprises a chuck for displacing said simulated wafer into a Z-direction towards and away from said wafer probe arrangement, said chuck further supporting the DUT wafer structure during said DUT testing. ### Claim 6 (depends on 1) A test system as claimed in claim 1, wherein a retainer frame extends about the periphery of said load plate for maintaining said load plate on said support plate. ### Claim 7 (depends on 1) A test system as claimed in claim 1, wherein said simulated wafer is mounted to the side of a chuck or integrated into a scrub block, said chuck further supporting the DUT wafer structure during said DUT testing. ### Claim 8 (depends on 1) A test system as claimed in claim 1, wherein each of said plurality of load cells comprise a strain gauge. ### Claim 9 (depends on 1) A test system as claimed in claim 1, wherein measurements indicative of planarity are determined from the magnitude of the individual loads at each of said load cells. ### Claim 10 (depends on 1) A test system as claimed in claim 1, wherein said plurality of load cells comprises three load cells at known locations relative to said probe array. ### Claim 11 (depends on 1) A test system as claimed in claim 1, wherein different simulated wafer structures are optimized for selectively high or low probe forces or for probes of high or low compliance in dependence upon specific physical applications. ### Claim 12 A method of testing devices under test (DUTs) located on a product wafer, said method comprising: providing a support plate with a surface with a simulated wafer being arranged thereon, said simulated wafer including a load plate and a plurality of load cells retained in a spaced array interposed between said load plate and said support plate surface; providing a wafer probe arrangement including a device interface board mounting a plurality of probes being arrayed in opposed relationship to said load cells facing towards said load plate; causing a movable structure to impart movement to said support plate for biasing said simulated wafer into contact with said at least probe, and determining the optimum overdrive for a specific product which results in optimized probe force; and implementing said optimum overdrive during testing of said DUTs on said product wafer, whereby said probe force for each said probe of the plurality of probes responsive to pressure exerted between said respective load cells and probes is indicative of the plurality of the wafer surface at the final overdrive position for said support plate. ### Claim 13 (depends on 12) A method as claimed in claim 12, further comprising the steps of: measuring an amount of force on a device under test (DUT) when biased for contact with said plurality of probes; and, measuring differences in planarity between said simulated wafer and said plurality of probes. ### Claim 14 (depends on 13) A method as claimed in claim 13, wherein said measuring differences in planarity includes: monitoring a location of an X-component of the force on the DUT and a location of an Y-component of the force on the DUT, said method including determining a limit for overdriving said simulated wafer as a function of said measured probe force on said DUT and said X-and Y-components thereof. ### Claim 15 (depends on 14) A method as claimed in claim 14, wherein said overdrive is determined by recording a difference between an initial position of said simulated wafer when biased to make initial contact with said plurality of probes, and a final position of said simulated wafer when biased to contact said plurality of probes such that said probes are minimally deflected. ### Claim 16 (depends on 12) A method as claimed in claim 12, wherein said movable structure comprises a chuck for displacing said simulated wafer into a Z-direction towards and away from said wafer probe arrangement, said chuck further supporting the DUT wafer structure during said DUT testing. ### Claim 17 (depends on 12) A method as claimed in claim 12, wherein different simulated wafer structures are optimized for selectively high or low probe forces or probe systems with high or low compliance in dependence upon specific physical applications.