High density probe card apparatus and method of manufacture
AssigneeTexas Instruments Incorporated
InventorsReynaldo M. Rincon, Jerry Broz, Lester Wilson, Richard W. Arnold
Life of this patent
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Abstract
A high density probe card contact apparatus including a support block fitted into an opening in a probe card, and holding a plurality of fine tipped needles extending inward and below an opening in the center of the block. The needle tips are a noble metal integrally connected with a less costly conductive metal which forms the more widely spaced fingers of the needles, and which terminate in contacts to the probe card. Laser etching defines the fine needle pattern in a thin sheet of the two-metal composition which is secured to a polymeric film. The contact apparatus is assembled by positioning one or more sections of the polymer with needles on the support film.
Claims25
A probe card contact apparatus including in combination:
- a support block, having a curved shape on one major surface, a planar second surface, and an opening in the center,
- one or more comb assemblages having a plurality of two-metal probe needles adhered to the first surface of a polymeric film segment wherein the fine tips of the needle extend beyond the film, and the fingers on the opposite end are secured atop the curved surface of said support block, and
- a probe card having an opening fitted to said support block perimeter and a plurality of conductive traces corresponding to said probe finger terminations.
A contact apparatus including:
- a support block, having a curved shape on one major surface, and a planar second surface,
- one or more comb assemblages having a plurality of two-metal needles adhered to the surface of a dielectric film with the needle tips extending beyond the film, and the fingers secured to the curved surface of said support block.
A contact apparatus including:
- a support block, having two parallel major surfaces,
- one or more comb assemblages having a plurality of two-metal needles adhered to the surface of a dielectric film with the needle tips extending beyond the film, and the fingers secured to one of the major surface of said support block.
Dependencies are inferred from the claim text.