Field emission-type electron source

A field emission-type electron source comprising:

• a lower electrode;
• a surface electrode;
• and
• an electron transit layer interposed between said lower electrode and said surface electrode to allow an electron to pass therethrough, wherein
• the field emission-type electron source is adapted to allow an electron passed through said electron transit layer to be emitted through said surface electrode, wherein
• said surface electrode is composed of a multilayer film including a conductive carbide layer or conductive nitride layer and a noble metal layer, said surface electrode having a surface formed with a number of concave portions allowing the multilayer film to have a locally reduced thickness.

A field emission-type electron source comprising:

• a lower electrode;
• an electron transit layer formed on said lower electrode and composed of a composite nanocrystal layer including polycrystalline silicon and a number of nanocrystalline silicons residing adjacent to a grain boundary of the polycrystalline silicon;
• and
• a surface electrode formed on said electron transit layer, wherein
• the field emission-type electron source is adapted to allow an electron passing through said electron transit layer to be emitted through said surface electrode, wherein
• at least a portion of said lower electrode is made of layer-structured conductive carbide or layer-structured conductive nitride.