# US 6,720,680 B1 · Flat motor device and its driving method, stage device and its driving method, exposure apparatus and exposure method, and device and its manufacturing method > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 6,720,680 B1 - Document ID: US6720680B1 - Status: Granted - Kind: B1 - Application number: 09/890,934 - Filed: 2001-08-06 - Granted: 2004-04-13 - Earliest claimed: 1999-02-04 - Assignees: Nikon Corporation - Inventors: Keiichi Tanaka - Web page: https://patentgrep.com/patent/US6720680B1 ## CPC - G03F 7/70725: {control} - G03F 7/70758: {Drive means, e.g. actuators, motors for long- or short-stroke modules or fine or coarse driving} - G05D 3/12: using feedback - G12B 5/00: Adjusting position or attitude, e.g. level, of instruments or other apparatus, or of parts thereof (levels per se G01C9/00); Compensating for the effects of tilting or acceleration, e.g. for optical apparatus - H02K 2201/18: Machines moving with multiple degrees of freedom - G03F: PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR; (phototypographic composing devices B41B; photosensitive materials or processes for photographic purposes G03C; electrophotography, sensitive layers or processes therefor G03G) - G05D: SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES - G12B: CONSTRUCTIONAL DETAILS OF INSTRUMENTS, OR COMPARABLE DETAILS OF OTHER APPARATUS, NOT OTHERWISE PROVIDED FOR - H02K: DYNAMO-ELECTRIC MACHINES (dynamo-electric relays H01H53/00; conversion of DC or AC input power into surge output power {H03K3/53}) ## Abstract An armature unit is made up of a matrix of armature coils each having a rectangular current path. A magnetic pole unit is made up of thrust generating magnets arranged in a matrix at arrangement periods each of which is an integral multiple of each of the arrangement periods at which the armature coils are arranged and having a rectangular magnetic pole surface, interpolating magnets for reinforcing the magnetomotove force, and a magnetic member. A mover is supported by air levitation above a guide surface by the pressure of pressurized gas, and the current supplied to the armature coils is controlled, thus driving the mover. An armature coil is housed in a closed space within a base, and a coolant is supplied from a cooling device into the closed space, thereby cooling the armature coils. Therefore, a substrate mounted on a substrate table integrated with the mover is precisely positioned. ## Claims ### Claim 1 A planar motor comprising: a stator having a coil; and a mover having a magnetic flux generator, the planar motor moving the mover on a movement plane by electromagnetic force which is generated between the coil and the magnetic flux generator, further comprising: a controller that detects position information of the mover based on information concerning an inductance of the coil, the inductance varying in accordance with the relative-position relation between the stator and the mover. ### Claim 2 (depends on 1) A planar motor according to claim 1, wherein the stator comprises a plurality of coils, and wherein the controller detects position information of the mover based on an inductance distribution with respect to the plurality of coils, the inductance distribution being generated in accordance with the relative-position relation between the stator and the mover. ### Claim 3 (depends on 2) A planar motor according to claim 2, wherein the stator comprises a coil-supporting member that is made of a magnetic material and that supports the plurality of coils. ### Claim 4 (depends on 1) A planar motor according to claim 1, wherein the position information of the mover includes at least one of a piece of position information with respect to a first axis direction and a second axis direction that define the movement plane, and a piece of position information with respect to rotation about a third axis perpendicular to the first axis direction and the second axis direction. ### Claim 5 (depends on 1) A planar motor according to claim 1, wherein the controller controls an electric current supplied to the coil based on a detection result of position information of the mover. ### Claim 6 (depends on 1) A planar motor according to claim 1, wherein the magnetic flux generator comprises a plurality of magnets magnetized in a direction almost perpendicular to the movement plane. ### Claim 7 (depends on 6) A planar motor according to claim 6, wherein the magnetic flux generator further comprises a magnet-supporting member that is made of a magnetic material and that supports the plurality of magnets. ### Claim 8 (depends on 1) A planar motor according to claim 1, wherein the magnetic flux generator comprises a plurality of magnets magnetized in a direction not perpendicular to the movement plane. ### Claim 9 (depends on 1) A planar motor according to claim 1, further comprising: an inductance measurement unit to measure an inductance of the coil. ### Claim 10 A planar motor comprising: a stator having a coil; and a mover having a magnet, the planar motor moving the mover on a movement plane by eletromagnetic force which is generated between the coil and the magnet, further comprising: a controller that controls position of the mover based on information concerning an inductance of the coil, the inductance varying in accordance with the relative-position relation between the stator and the mover. ### Claim 11 (depends on 10) A planar motor according to claim 10, wherein the stator comprises a plurality of coils, and wherein the controller controls position of the mover based on an inductance distribution with respect to the plurality of coils, the inductance distribution being generated in accordance with the relative-position relation between the stator and the mover. ### Claim 12 (depends on 10) A planar motor according to claim 10, further comprising: an inductance measurement unit to measure an inductance of the coil. ### Claim 13 (depends on 1) A stage unit comprising: a planar motor according to claim 1; and a stage member connected with the mover. ### Claim 14 (depends on 13) An exposure apparatus comprising: an illumination system sending out illumination light for exposure; and a stage unit according to claim 13 on which an object to be arranged in a path of the illumination light is mounted. ### Claim 15 (depends on 14) A device on which a predetermined pattern is formed, and which is manufactured by using an exposure apparatus according to claim 14. ### Claim 16 A stage unit comprising: a stage member moving on a movement plane; a driving unit comprising: a mover that has a magnetic flux generator and that is provided on the stage member and a stator having a plurality of coils, the driving unit driving the stage member by electromagnetic force which is generated between the coils and the magnetic flux generator; an inductance measurement unit to measure inductances of the coils; and a controller to control respective electric currents supplied to the plurality of coils based on measurement results by the inductance measurement unit. ### Claim 17 (depends on 16) A stage unit according to claim 16, wherein the magnetic flux generator comprises a plurality of magnets magnetized in a direction almost perpendicular to the movement plane. ### Claim 18 (depends on 17) A stage unit according to claim 17, wherein the stage member is made of a non-magnetic material, and wherein the magnetic flux generator further comprises a magnet-supporting member that is made of a magnetic material and that supports the plurality of magnets. ### Claim 19 (depends on 16) A stage unit according to claim 16, wherein the magnetic flux generator comprises a plurality of magnets magnetized in a direction not perpendicular to the movement plane. ### Claim 20 (depends on 16) A stage unit according to claim 16, wherein the stator comprises a coil-supporting member that is made of a magnetic material and that supports the plurality of coils. ### Claim 21 (depends on 20) A stage unit according to claim 20, further comprising: a position detection unit to detect position of the stage member, and wherein the controller controls respective electric currents supplied to the plurality of coils based on at least one of a detection result by the position detection unit and a set of measurement results by the inductance measurement unit. ### Claim 22 (depends on 21) A stage unit according to claim 21, wherein when the position detection unit can detect position of the stage member, the controller controls position of the stage member by controlling respective electric currents supplied to the plurality of coils based on a detection result by the position detection unit, and wherein when the position detection unit cannot detect position of the stage member, the controller controls position of the stage member by controlling respective electric currents supplied to the plurality of coils based on measurement results by the inductance measurement unit. ### Claim 23 (depends on 16) An exposure apparatus comprising: an illumination system sending out illumination light for exposure; and a stage unit according to claim 16, on which an object to be arranged in a path of the illumination light is mounted. ### Claim 24 (depends on 23) An exposure apparatus according to claim 23, wherein the object is a substrate which is exposed by the illumination light, and onto which a predetermined pattern is transferred. ### Claim 25 (depends on 21) An exposure apparatus comprising: an illumination system sending out illumination light for exposure; and a stage unit according to claim 21, on which an object to be arranged in a path of the illumination light is mounted. ### Claim 26 (depends on 25) An exposure apparatus according to claim 25, wherein the object is a substrate which is exposed by the illumination light, and onto which a predetermined pattern is transferred. ### Claim 27 (depends on 25) An exposure apparatus according to claim 25, wherein when the position detection unit can detect position of the stage member, the controller controls position of the stage member by controlling respective electric currents supplied to the plurality of coils based on a detection result by the position detection unit, wherein when the position detection unit cannot detect position of the stage member, the controller controls position of the stage member by controlling respective electric currents supplied to the plurality of coils based on measurement results by the inductance measurement unit, and wherein upon exposure, when it is judged that the reason why the position detection unit cannot detect position of the stage member is the stage member being out of a range over which the position detection unit can detect position thereof, the controller restores the stage member to within the detection range of the position detection unit based on measurement results by the inductance measurement unit. ### Claim 28 (depends on 27) An exposure apparatus according to claim 27, wherein after restoration of the stage member, the controller continues to control position of the stage member for exposure based on a detection result by the position detection unit. ### Claim 29 (depends on 27) An exposure apparatus according to claim 27, wherein after restoration of the stage member, the controller moves the stage member to an initial position based on a detection result by the position detection unit. ### Claim 30 (depends on 27) An exposure apparatus according to claim 27, wherein when the position detection unit can detect position of the stage member, the controller controls position of the stage member by controlling respective electric currents supplied to the plurality of coils based on a detection result by the position detection unit, wherein when the position detection unit cannot detect position of the stage member, the controller controls position of the stage member by controlling respective electric currents supplied to the plurality of coils based on measurement results by the inductance measurement unit, and wherein upon exposure, when the position detection unit cannot detect position of the stage member, the controller controls position of the stage member for exposure based on measurement results by the inductance measurement unit. ### Claim 31 (depends on 23) A device on which a predetermined pattern is formed, and which is manufactured by using an exposure apparatus according to claim 23. ### Claim 32 (depends on 25) A device on which a predetermined pattern is formed, and which is manufactured by using an exposure apparatus according to claim 25. ### Claim 33 A driving method that drives a planar motor comprising: a stator having a coil; and a mover having a magnetic flux generator, so as to move the mover on a movement plane by electromagnetic force which is generated between the coil and the magnetic flux generator, wherein position information of the mover is detected based on information concerning an inductance of the coil, the inductance varying in accordance with the relative-position relation between the stator and the mover. ### Claim 34 (depends on 33) A driving method of a planar motor according to claim 33, wherein the stator comprises a plurality of coils, and wherein position information of the mover is detected based on an inductance distribution with respect to the plurality of coils, the inductance distribution being generated in accordance with the relative-position relation between the stator and the mover. ### Claim 35 (depends on 34) A driving method of a planar motor according to claim 34, wherein the stator comprises a coil-supporting member that is made of a magnetic material and that supports the plurality of coils. ### Claim 36 (depends on 34) A driving method of a planar motor according to claim 34, wherein inductances of the plurality of coils are measured individually. ### Claim 37 (depends on 33) A driving method of a planar motor according to claim 33, wherein the position information of the mover includes at least one of a piece of position information with respect to a first axis direction and a second axis direction that define the movement plane, and a piece of position information with respect to rotation about a third axis perpendicular to the first axis direction and the second axis direction. ### Claim 38 (depends on 33) A driving method of a planar motor according to claim 33, wherein an electric current supplied to the coil is controlled based on a detection result of position information of the mover. ### Claim 39 (depends on 33) A driving method of a planar motor according to claim 33, wherein the magnetic flux generator comprises a plurality of magnets magnetized in a direction almost perpendicular to the movement plane. ### Claim 40 (depends on 39) A driving method of a planar motor according to claim 39, wherein the magnetic flux generator further comprises a magnet-supporting member that is made of a magnetic material and that supports the plurality of magnets. ### Claim 41 (depends on 33) A driving method of a planar motor according to claim 33, wherein the magnetic flux generator comprises a plurality of magnets magnetized in a direction not perpendicular to the movement plane. ### Claim 42 (depends on 33) A driving method that drives a stage unit comprising a planar motor which comprises a stator having a coil and a mover having a magnetic flux generator, and which moves the mover on a movement plane, and a stage member moving as one entity with the mover, wherein upon moving the stage member is used a driving method of a planar motor according to claim 33. ### Claim 43 (depends on 42) An exposure method comprising the steps of sending out illumination light for exposure and, by driving a stage unit on which an object is mounted, moving the object relative to a path of the illumination light, wherein upon driving the stage unit is used a driving method of a stage unit according to claim 42. ### Claim 44 (depends on 43) A device manufacturing method including a lithography process, wherein the lithography process uses an exposure method according to claim 43. ### Claim 45 A driving method that drives a planar motor comprising: a stator having a coil; and a mover having a magnet, so as to move the mover on a movement plane by electromagnetic force which is generated between the coil and the magnet, wherein position of the mover is controlled based on information concerning an inductance of the coil, the inductance varying in accordance with the relative-position relation between the stator and the mover. ### Claim 46 (depends on 45) A driving method of a planar motor according to claim 45, wherein the stator comprises a plurality of coils, and wherein position of the mover is controlled based on an inductance distribution with respect to the plurality of coils, the inductance distribution being generated in accordance with the relative-position relation between the stator and the mover. ### Claim 47 (depends on 46) A driving method of a planar motor according to claim 46, wherein inductances of the plurality of coils are measured individually. ### Claim 48 A driving method that drives a stage unit comprising a stage member moving on a movement plane and a driving unit comprising a mover which has a magnetic flux generator and which is provided on the stage member and a stator having a plurality of coils and driving the stage member by electromagnetic force which is generated between the coils and the magnetic flux generator, wherein respective electric currents supplied to the plurality of coils are controlled based on results of measuring inductances of the plurality of coils. ### Claim 49 (depends on 48) A driving method of a stage unit according to claim 48, wherein the magnetic flux generator comprises a plurality of magnets magnetized in a direction almost perpendicular to the movement plane. ### Claim 50 (depends on 49) A driving method of a stage unit according to claim 49, wherein the stage member is made of a non-magnetic material, and wherein the magnetic flux generator further comprises a magnet-supporting member that is made of a magnetic material and that supports the plurality of magnets. ### Claim 51 (depends on 48) A driving method of a stage unit according to claim 48, wherein the magnetic flux generator comprises a plurality of magnets magnetized in a direction not perpendicular to the movement plane. ### Claim 52 (depends on 48) A driving method of a stage unit according to claim 48, wherein the stator comprises a coil-supporting member that is made of a magnetic material and that supports the plurality of coils. ### Claim 53 (depends on 52) A driving method of a stage unit according to claim 52, wherein the stage unit further comprises a position detection unit to detect position of the stage member, and wherein respective electric currents supplied to the plurality of coils are controlled based on at least one of a detection result by the position detection unit and a set of measurement results of the inductances. ### Claim 54 (depends on 53) A driving method of a stage unit according to claim 53, wherein when the position detection unit can detect position of the stage member, position of the stage member is controlled by controlling respective electric currents supplied to the plurality of coils based on the result of detecting position, and wherein when the position detection unit cannot detect position of the stage member, position of the stage member is controlled by controlling respective electric currents supplied to the plurality of coils based on measurement results of the inductances. ### Claim 55 (depends on 48) An exposure method comprising the steps of sending out illumination light for exposure and, by driving a stage unit on which an object is mounted, moving the object relative to a path of the illumination light, wherein upon driving the stage unit is used a driving method of a stage unit according to claim 48. ### Claim 56 (depends on 55) An exposure method according to claim 55, wherein the object is a substrate which is exposed by the illumination light, and onto which a predetermined pattern is transferred. ### Claim 57 (depends on 53) An exposure method comprising the steps of sending out illumination light for exposure and, by driving a stage unit on which an object is mounted, moving the object relative to a path of the illumination light, wherein upon driving the stage unit is used a driving method of a stage unit according to claim 53. ### Claim 58 (depends on 57) An exposure method according to claim 57, wherein the object is a substrate which is exposed by the illumination light, and onto which a predetermined pattern is transferred. ### Claim 59 (depends on 57) An exposure method according to claim 57, wherein when the position detection unit can detect position of the stage member, position of the stage member is controlled by controlling respective electric currents supplied to the plurality of coils based on the result of detecting position, and wherein when the position detection unit cannot detect position of the stage member, position of the stage member is controlled by controlling respective electric currents supplied to the plurality of coils based on measurement results of the inductances, and wherein upon exposure, when it is judged that the reason why the position detection unit cannot detect position of the stage member is the stage member being out of a range over which the position detection unit can detect position thereof, the stage member is restored to within the detection range of the position detection unit based on measurement results of the inductances. ### Claim 60 (depends on 59) An exposure method according to claim 59, wherein after restoration of the stage member, position of the stage member continues to be controlled for exposure based on a detection result by the position detection unit. ### Claim 61 (depends on 59) An exposure method according to claim 59, wherein after restoration of the stage member, the stage member is moved to an initial position based on a detection result by the position detection unit. ### Claim 62 (depends on 57) An exposure method according to claim 57, wherein when the position detection unit can detect position of the stage member, position of the stage member is controlled by controlling respective electric currents supplied to the plurality of coils based on a result of detecting position of the stage member, wherein when the position detection unit cannot detect position of the stage member, position of the stage member is controlled by controlling respective electric currents supplied to the plurality of coils based on measurement results of the inductances, and wherein upon exposure, when the position detection unit cannot detect position of the stage member, position of the stage member is controlled for exposure based on measurement results of the inductances. ### Claim 63 (depends on 55) A device manufacturing method including a lithography process, wherein the lithography process uses an exposure method according to claim 55. ### Claim 64 (depends on 57) A device manufacturing method including a lithography process, wherein the lithography process uses an exposure method according to claim 57. ### Claim 65 (depends on 10) A stage unit comprising: a planar motor according to claim 10; and a stage member connected with the mover. ### Claim 66 (depends on 45) A driving method that drives a stage unit comprising a planar motor which comprises a stator having a coil and a mover having a magnetic flux generator, and which moves the mover on a movement plane, and a stage member moving as one entity with the mover, wherein upon moving the stage member is used a driving method of a planar motor according to claim 45. ### Claim 67 A planar motor comprising: a stator having a coil; and a mover having a magnetic flux generator, the planar motor moving the mover on a movement plane, wherein the magnetic flux generator comprises a plurality of magnets magnetized in a direction not perpendicular to the movement plane, and the planar motor further comprising: a controller that detects position information of the mover based on information concerning an inductance of the coil, the inductance varying in accordance with the relative-position relation between the stator and the mover. ### Claim 68 A stage unit comprising: a stage member moving on a movement plane; a driving unit comprising: a mover that has a magnetic flux generator comprising a plurality of magnets magnetized in a direction not perpendicular to the movement plane and that is provided on the stage member, and a stator having a plurality of coils, the driving unit driving the stage member by electromagnetic force; an inductance measurement unit to measure inductances of the coils; and a controller to control respective electric currents supplied to the a plurality of coils based on measurement results by the inductance measurement unit. ### Claim 69 A stage unit comprising: a stage member moving on a movement plane; a driving unit comprising: a mover that has a magnetic flux generator and that is provided on the stage member and a stator having a plurality of coils, the driving unit driving the stage member by electromagnetic force; an inductance measurement unit to measure inductances of the coils; a position detection unit to detect position of the stage member; and a controller to control respective electric currents supplied to the plurality of coils based on at least one of a detection result by the position detection unit and a set of measurement results by the inductance measurement unit. ### Claim 70 (depends on 69) An exposure apparatus comprising: an illumination system sending out illumination light for exposure; and a stage unit according to claim 69, on which an object to be arranged in a path of the illumination light is mounted. ### Claim 71 A driving method that drives a planar motor comprising: a stator having a coil; and a mover having a magnetic flux generator, so as to move the mover on a movement plane, wherein the magnetic flux generator comprises a plurality of magnets magnetized in a direction not perpendicular to the movement plane, and wherein position information of the mover is detected based on information concerning an inductance of the coil, the inductance varying in accordance with the relative-position relation between the stator and the mover. ### Claim 72 A driving method that drives a stage unit comprising a stage member moving on a movement plane and a driving unit comprising a mover which has a magnetic flux generator comprising a plurality of magnets magnetized in a direction not perpendicular to the movement plane and which is provided on the stage member, and a stator having a plurality of coils and driving the stage member by electromagnetic force, wherein respective electric currents supplied to the plurality of coils are controlled based on results of measuring inductances of the plurality of coils. ### Claim 73 A driving method that drives a stage unit comprising: a stage member moving on a movement plane and a driving unit comprising a mover which has a magnetic flux generator and which is provided on the stage member and a stator having a plurality of coils and driving the stage member by electromagnetic force, wherein the stage unit further comprises a position detection unit to detect position of the stage member, and wherein respective electric currents supplied to the plurality of coils are controlled based on at least one of a detection result by the position detection unit and a set of measurement results of the inductances. ### Claim 74 (depends on 73) An exposure method comprising the steps of sending out illumination light for exposure and, by driving a stage unit on which an object is mounted, moving the object relative to a path of the illumination light, wherein upon driving the stage unit is used a driving method of a stage unit according to claim 73.