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US 6,720,626 B1Granted
Semiconductor device having improved gate structure
AssigneeRenesas Technology Corp.
InventorMotoshige Igarashi
Life of this patent
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Abstract
A gate insulating film is formed on a semiconductor substrate, and a gate electrode is formed by deposition of semiconductor material on the gate insulating film. An amorphous layer is then formed along the surface of or inside the gate electrode, and side walls are formed on the gate electrode. Finally, impurities are implanted into the semiconductor substrate by ion implantation while the gate electrode and the side walls are used as masks.
Claims1
A semiconductor device including a MOS transistor comprising:
- a semiconductor substrate;
- a gate insulating film on said semiconductor substrate;
- a gate electrode;
- an amorphous layer, having a grain size of 0.05 μm or less, formed on the upper surface of or within the gate electrode extending substantially parallel to the substrate;
- an amorphous layer, having grain size of 0.05 μm or less, formed along the side surfaces of the gate electrode;
- and
- a conductive region which is formed in said semiconductor substrate by ion implantation after formation of said amorphous layer,
- wherein a semiconductor material layer having nitrogen concentration of 1×1020−1×1022 atoms/cm3 is provided as said amorphous layer along the surface of or inside said gate electrode, and a semiconductor material layer having a nitrogen concentration of 1×1020−1×1021 atoms/cm3 is provided as said amorphous layer along the side surfaces of said gate electrode.
5 more elements
Dependencies are inferred from the claim text.