Structure for reducing contact aspect ratios
AssigneeMicron Technology, Inc.
InventorsScott J. Deboer, Vishnu K. Agarwal
Life of this patent
Estimating the term…
Abstract
An intermediate metal plug is used to raise the platform to which contact is to be made. In the illustrated process, a partial bit line plug is formed adjacent a stacked capacitor, and an interlevel dielectric formed over the capacitor. The bit line contact is completed by extending a via from the bit line, formed above the interlevel dielectric, down to the level of the intermediate plug, and the via is filled with metal. The height of the via to be filled is thus reduced by the height of the intermediate plug. In one embodiment, the intermediate plug is slightly shorter than an adjacent container-shaped capacitor. In another embodiment, the intermediate plug is about as high as an adjacent stud capacitor.
Claims9
An integrated circuit, comprising:
- an electronic device formed above a semiconductor substrate, the device extending upwardly from a first level to a second level;
- a conducting line above the electronic device;
- an interlevel dielectric interposed between and electrically insulating the electronic device and the conducting line;
- and
- a contact plug extending downwardly through the interlevel dielectric from the conducting line to an intermediate level between the first level and the second level, the contact plug electrically insulated from direct contact with the electronic device, wherein the first level is a bottom level of the electronic device and wherein the intermediate level is a bottom level of the contact plug.
An integrated circuit, comprising:
- an electronic device formed above a semiconductor substrate, the device extending upwardly from a first level to a second level;
- a conducting line above the electronic device;
- an interlevel dielectric interposed between and electrically insulating the electronic device and the conducting line;
- and
- a contact plug extending downwardly through the interlevel dielectric from the conducting line to an intermediate level between the first level and the second level, the contact plug electrically insulated from direct contact with the electronic device, further comprising a second contact plug extending downwardly from the contact plug and in electrical communication with the substrate and further comprising a lower contact plug extending between the second contact plug and the substrate.
Dependencies are inferred from the claim text.