Charge-coupled device having a reduced width for barrier sections in a transfer channel
AssigneeNEC Electronics Corporation
InventorShiro Tsunai
Life of this patent
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Abstract
A charge-coupled device (CCD) includes first-level transfer electrodes and second-level transfer electrodes alternately arranged along a transfer channel, wherein charge storage sections underlying the first-level transfer electrodes have a larger width than barrier sections underlying the second-level transfer electrodes. First and second interconnect lines supply two-phase driving signals to the transfer electrodes. Contact plugs connecting the first interconnect line to the transfer electrodes and contact plugs connecting the second interconnect line are located at opposite sides with respect to the center line of the transfer channel.
Claims7
A charge-coupled device (CCD) comprising:
- a semiconductor substrate having therein a transfer channel on a surface region of said semiconductor substrate;
- a plurality of first transfer electrodes and a plurality of second transfer electrodes overlying said semiconductor substrate and alternately arranged along said transfer channel;
- and
- first and second interconnect lines for supplying two-phase driving signals to said first and second transfer electrodes to transfer electric charge along said transfer channel, wherein:
- said transfer channel includes a plurality of first diffused regions each underlying a corresponding one of said first transfer electrodes and a plurality second diffused regions each underlying a corresponding one of said second transfer electrodes, said first diffused regions constituting charge storage sections and said second diffused regions constituting barrier sections during transferring the electric charge;
- and
- each of said charge storage sections has a width larger than a width of each of said barrier sections.
Dependencies are inferred from the claim text.