Method and apparatus for fingerprint detection and analysis

Abstract

A method of detecting fingerprints on a substrate includes ion beam mixing materials associated with the fingerprint into the substrate to create an ion beam mixed fingerprint; and analyzing the ion beam mixed fingerprint. Analyzing the ion beam mixed fingerprint may include optical imaging, scanning with a scanning electron microscope, or performing a surface analysis technique on the ion beam mixed fingerprint to identify the chemical composition of at least one material in at least one of the fingerprint and the substrate. In one aspect, the surface analysis technique includes at least one of Auger Spectroscopy, Secondary Ion Mass Spectroscopy (SIMS), Secondary Electron Microscopy (SEM), Particle Induced X-ray Emission (PIXE), and Energy Dispersive X-ray Spectroscopy (EDS). The analyzing may further include mapping the chemical composition of the at least one material in the at least one of the fingerprint and the substrate to produce a computer generated image of the fingerprint. The mass (ion species), fluence, and energy of the incident ion beam for various substrates are provided.

Dependencies are inferred from the claim text.