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US 6,720,559 B2Granted
Infrared sensor
AssigneeMurata Manufacturing Co., Ltd.
InventorRyuichi Kubo
Life of this patent
Estimating the term…
Abstract
An infrared sensor is provided, which includes a substrate 12, a diaphragm 14 supported by the substrate, at least one thermocouple 17 provided with a cold junction 20 formed on the substrate and a hot junction 18 formed on the diaphragm, and an infrared-absorptive film 24 formed on the diaphragm so as to cover the hot junction of the thermocouple. The area of the infrared-absorptive film is 64% to 100% of the area of the diaphragm.
Claims9
An infrared sensor comprising:
- a substrate;
- a diaphragm supported by said substrate;
- at least one thermocouple provided with a cold junction formed on said substrate and a hot junction formed on said diaphragm;
- and
- an infrared-absorptive film formed on said diaphragm so as to cover the hot junction of the thermocouple,
- wherein the area of the infrared-absorptive film is 64% to 100% of the area of said diaphragm.
3 more elements
An infrared sensor comprising:
- a substrate;
- a substantially rectangular diaphragm supported by said substrate;
- at least one thermocouple provided with a cold junction formed on said substrate and a hot junction formed on said diaphragm;
- and
- a substantially rectangular infrared-absorptive film formed on said diaphragm so as to cover the hot junction of the thermocouple,
- wherein the length of a side of the substantially rectangular infrared-absorptive film is 8/10 to 10/10 of the length of the aide of said diaphragm.
3 more elements
An infrared sensor comprising:
- a substrate;
- a substantially circular diaphragm supported by said substrate;
- at least one thermocouple provided with a cold junction formed on said substrate and a hot junction formed on said diaphragm;
- and
- a substantially circular infrared-absorptive film formed on said diaphragm so as to cover the hot junction of the thermocouple,
- wherein the inner diameter of the substantially circular infrared-absorptive film is from 80% to 100% of the inner diameter of said diaphragm.
3 more elements
Dependencies are inferred from the claim text.