Particle beam apparatus

A particle beam apparatus comprising:

• a source for providing a primary particle beam along a primary beam axis;
• an objective lens for focussing the primary particle beam onto a specimen so as to release particles therefrom;
• and
• a detection system for image generation;
• said detection system comprising:
• converter means with a conversion area for converting the released particles into secondary particles;
• electrode means for influencing the converted secondary particles;
• and
• at least one detector for detecting the converted secondary particles;
• wherein the objective lens is formed by an immersion lens for decelerating the primary particle beam from a first higher energy to a second final energy before the primary particle beam impinges on the specimen so as to release particles therefrom, said released particles being accelerated by the immersion lens before reaching the detector system;
• wherein the detection system is arranged in front of the immersion lens, and wherein the converter means and the electrode means are adapted to control the converted secondary particles in such a way that a voltage between the converter means and the electrode means prevents converted secondary particles released at a specific part or parts of the conversion area from reaching the detector.